光学学报, 2017, 37 (12): 1212001, 网络出版: 2018-09-06   

光频扫描干涉绝对测距漂移误差与补偿方法研究 下载: 883次

Study of Drift Error and Its Compensation Method in Absolute Distance Measurement by Optical Frequency Scanning Interferometry
作者单位
天津大学精密仪器与光电子工程学院精密测试技术及仪器国家重点实验室, 天津 300072
摘要
光频扫描干涉(OFSI)技术是一种具有广阔发展前景的高精度绝对测距技术。在实际应用中,该技术对光程差漂移非常敏感,测量过程中光程差的微小漂移通过放大因子的放大,引入显著的测量误差。详细分析了由于测量臂光程漂移引入的多普勒效应对测量结果的影响,并根据频移误差放大项的符号与光频扫描方向相一致的特点,使用光频三角波扫描方法对漂移误差进行补偿。实验结果显示,对距离为3.6 m的目标进行10次重复测量的标准差从21.51 μm减小到2.85 μm。另外,与干涉仪的对比实验结果显示,本方法所得残余误差的标准差由补偿前的18.6 μm减小到5.6 μm,提高了测量精度。
Abstract
Optical frequency scanning interferometry (OFSI) is a high-precision absolute distance measurement technique with broad prospect. However,in practice, it is sensitive to the drift of optical path difference. Due to the influence of the amplification factor, the slight drift of optical path difference in measurement process is enlarged, which introduces obvious measurement error. The influence of Doppler effect introduced by the optical path drift of measuring arm on the measurement result has been detailedly analyzed in this paper. According to that the sign of the frequency drift error is consistent with direction of frequency scanning, the drift error is compensated by optical frequency scanning method with triangular wave. The experimental results show that, for the target at 3.6 m, the standard deviation decreases from 21.51 μm to 2.85 μm with 10 times of measurements. Furthermore, the contrast experiment result with interferometer shows that the standard deviation of residual error of the proposed method decreases from 18.6 μm (before compensation) to 5.6 μm, and the measurement accuracy is enhanced.

张雅雅, 郭寅, 任永杰, 尚岳, 刘洋, 邾继贵. 光频扫描干涉绝对测距漂移误差与补偿方法研究[J]. 光学学报, 2017, 37(12): 1212001. Yaya Zhang, Yin Guo, Yongjie Ren, Yue Shang, Yang Liu, Jigui Zhu. Study of Drift Error and Its Compensation Method in Absolute Distance Measurement by Optical Frequency Scanning Interferometry[J]. Acta Optica Sinica, 2017, 37(12): 1212001.

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