光学学报, 2019, 39 (7): 0712005, 网络出版: 2019-07-16   

基于总散射测量的表面质量检测新方法 下载: 1050次

Method for Surface Quality Inspection Based on Total Scattering Measurement
作者单位
1 四川大学电子信息学院, 四川 成都 610064
2 中国科学院光电技术研究所, 四川 成都 610209
3 超光滑表面无损检测安徽省重点实验室, 合肥知常光电科技有限公司, 安徽 合肥 230031
摘要
光学元件在加工及使用过程中引入的麻点或擦痕会严重影响其表面质量。基于Peterson疵病散射理论,将麻点或擦痕引起的散射光分为两部分,即对麻点(或擦痕)内部表面的散射光作漫反射分析,对麻点或擦痕外围轮廓引起的散射光作衍射分析。进一步考虑麻点和擦痕的挡光效应,以及麻点衍射消失的边界条件,通过将疵病散射理论与国家标准GB/T 1185—2006相结合,推导出麻点、擦痕的双向反射分布函数的解析表达式,进而分析了不同疵病级数下的角分辨散射和总散射。研究结果表明:表面疵病的总散射与疵病面积近似成线性正比,进而据此提出了一种基于总散射测量的表面质量检测新方法,并分析了光学元件表面疵病的阈值。
Abstract
Digs or scratches generated during the processing and application of optical components seriously affect the surface quality of these components. The scattered light caused by digs or scratches is divided into two parts based on Peterson’s defect scattering theory: geometric refraction or reflection from the surfaces inside scratches or digs and diffraction of light that passes around the scratch or dig. The analytical formulas for the bidirectional reflection distribution function of the scratches or digs are derived considering the light-blocking effect of the digs and scratches and the boundary conditions for the disappearance of diffraction around the digs, and by combining the theory of defect scattering with the new national standard of GB/T 1185-2006. Then, angular resolved scattering and total scattering are analyzed under different defect grade numbers. The results show that the total scattering of the surface defect is approximately linearly proportional to the area of the defect. On this basis, herein, a surface quality inspection method based on total scattering measurement is proposed, and the surface defect thresholds of optical components are analyzed.

黄聪, 张科鹏, 王翔, 孙年春, 张彬, 陈坚, 赵建华. 基于总散射测量的表面质量检测新方法[J]. 光学学报, 2019, 39(7): 0712005. Cong Huang, Kepeng Zhang, Xiang Wang, Nianchun Sun, Bin Zhang, Jian Chen, Jianhua Zhao. Method for Surface Quality Inspection Based on Total Scattering Measurement[J]. Acta Optica Sinica, 2019, 39(7): 0712005.

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