激光与光电子学进展, 2016, 53 (9): 090003, 网络出版: 2016-09-14
转轴激光多自由度运动误差测量综述 下载: 1037次
Review on Multi-Degree-of-Freedom Motion Error Measurement Methods for Rotary-Axis Laser
测量 转轴 多自由度运动误差 转角定位误差 measurement rotary axis multi-degree-of-freedom motion error angular positioning error
摘要
转轴为旋转运动提供了基准,是精密测量、加工、控制等设备的重要运动部件之一,在高端加工制造、航空航天、光学分析等领域具有重要地位。转轴在转动时具有六自由度几何运动误差,通过对六自由度误差的测量,建立误差补偿模型进行误差补偿,是目前世界上普遍采用的用于提高精密测量、加工、控制等设备精度的主要途径之一。综述了现有转轴激光多自由度误差测量方法,并分析了各种方法的优缺点,讨论了其发展趋势。
Abstract
Rotary axis is considered as the basis for rotational motion. It is a key component in precision measuring, machining and controlling equipments, and it plays a crucial role in high-end manufacturing, aerospace, and optical analysis fields. Each rotary axis has six degree-of-freedom translational and rotational errors. To improve the equipment accuracy, one of the commonly applied solutions is to measure the six degree-of-freedom errors and then to establish the error compensation model to compensate these errors. The progress in methods to measure the multi-degree-of-freedom motion errors in a rotary axis based on laser is reviewed, the principle, pros and cons of these methods are analyzed, and the trend in the field is discussed as well.
杨婧, 冯其波, 李家琨. 转轴激光多自由度运动误差测量综述[J]. 激光与光电子学进展, 2016, 53(9): 090003. Yang Jing, Feng Qibo, Li Jiakun. Review on Multi-Degree-of-Freedom Motion Error Measurement Methods for Rotary-Axis Laser[J]. Laser & Optoelectronics Progress, 2016, 53(9): 090003.