激光与光电子学进展, 2019, 56 (15): 150603, 网络出版: 2019-08-05   

光纤干涉次声传感器研制 下载: 1188次

Preparation of Fiber-Optic Interferometer Based Infrasound Sensor
作者单位
1 中国科学院电子学研究所传感技术国家重点实验室, 北京 100190
2 中国科学院大学, 北京 100049
摘要
设计并制作了一种基于光纤干涉仪的低频声传感器,用于检测频率小于20 Hz的次声信号。该传感器利用厚度为5 μm,半径为1/2 inch(1 inch=2. 54 cm)的圆形镍膜作为振膜,该振膜被平整地固定在金属腔体的一个端口,呈周边拉伸式。伸入腔室的单模光纤的端面与振膜内表面构成一个非本征型光纤法布里-珀罗干涉仪(EFPI),用于检测由声音导致的振膜的振动。为了优化传感器性能,基于弹性力学原理和有限元仿真软件,分析了振膜预应力和振膜厚度对传感器一阶谐振频率的影响。仿真结果表明在一定的膜厚范围内,一阶谐振频率对预应力非常敏感而对膜厚不敏感。利用B&K 4193-L-004型标准声传感器和42AE型标准次声发射腔对所制光纤次声传感器进行了测试,结果表明该传感器在0.1~20 Hz范围内具有良好的频率响应特性,对1 Hz声波的灵敏度高达285 mV/Pa。
Abstract
A low-frequency acoustic sensor based on fiber optic interferometer was designed and fabricated for detection of infrasound signals with a frequency less than 20 Hz. The sensor contains a metallic diaphragm that is a circular nickel membrane with a thickness of 5 μm and a radius of 1/2 inch (1 inch=2.54 cm), and the diaphragm is flatly fixed to a port of the metal cylinder in a peripherally stretched manner. The end face of the single-mode fiber protruding into the cylinder and the inner surface of the diaphragm constitute an extrinsic fiber Fabry-Perot interferometer (EFPI) for detecting the diaphragm's vibration caused by sound. In order to optimize the sensor performance, the effects of the prestress applied to the diaphragm and the diaphragm thickness on the first-order resonant frequency of the sensor are analyzed based on the principle of elastic mechanics and finite element simulation software. The simulation results show that the first-order resonant frequency is sensitive to prestress rather than to the diaphragm thickness under the condition of the diaphragm thickness being within a certain small range. The above-prepared fiber optic infrasound sensor was characterized with the B&K 4193-L-004 standard acoustic sensor and the 42AE standard infrasound source. The results show that the sensor has good frequency response in the range from 0.1 Hz to 20 Hz and the sensitivity to 1 Hz sound is as high as 285 mV/Pa.

李汉正, 吴高米, 马振钧, 任迪鹏, 张萌颖, 高然, 祁志美. 光纤干涉次声传感器研制[J]. 激光与光电子学进展, 2019, 56(15): 150603. Hanzheng Li, Gaomi Wu, Zhenjun Ma, Dipeng Ren, Mengying Zhang, Ran Gao, Zhimei Qi. Preparation of Fiber-Optic Interferometer Based Infrasound Sensor[J]. Laser & Optoelectronics Progress, 2019, 56(15): 150603.

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