激光与光电子学进展, 2020, 57 (9): 091201, 网络出版: 2020-05-06
反射相移在Fabry-Perot标准具间距测量中的影响 下载: 1178次
Influence of Reflection-Induced Retardance on the Measurement of Fabry-Perot Etalon Interval
测量 多光束干涉 反射相移 小数重合法 法布里-珀罗标准具 相对误差限 measurement multi-beam interference reflection-induced retardance excess fraction method Fabry-Perot etalon relative error limit
摘要
基于光学薄膜理论,采用光学特征矩阵法推导了空气隙Fabry-Perot(F-P)标准具高反射膜反射相移与入射角的数学模型,并用TFCalc膜系设计软件仿真分析了入射角范围在0°~3°时反射相移的变化,对数学模型进行了验证。结果表明,反射相移与入射角呈指数递增,入射角度在3°时反射相移为2.88×10 -3 rad。实验搭建了F-P干涉成像光路,测得F-P标准具间距为(2015.50919±0.00002) μm,相对误差限约为8.6×10 -9;与未考虑反射相移的测量结果[间距为(2015.50864±0.00082) μm,相对误差限约为9×10 -7]相比,测量准确度有了明显改善。
Abstract
Based on the optical thin film theory, the optical characteristic matrix method was used to derive a mathematical model of the reflection-induced retardance and incident angle of the high-reflection film for air-gap Fabry-Perot (F-P) etalon. The change in the reflection-induced retardance at incident angle ranging 0°-3° was analyzed using TFCalc membrane design software, and the mathematical model was verified. Results show that the reflection-induced retardance and the incident angle exponentially increase, and the reflection-induced retardance is close to 2.88×10 -3 rad when the incident angle is 3°. The experiment setup of the F-P interference imaging optical path, demonstrates that the F-P etalon interval is (2015.50919±0.00002) μm and the relative error limit is approximately 8.6×10 -9. Compared with the measurements that do not consider the reflection phase shift [the interval is (2015.50864±0.00082) μm and the relative error limit is approximately 9×10 -7], the measurement accuracy shows significant improvement.
余佳音, 樊静, 蓝旭辉, 沈小燕, 禹静. 反射相移在Fabry-Perot标准具间距测量中的影响[J]. 激光与光电子学进展, 2020, 57(9): 091201. Jiayin Yu, Jing Fan, Xuhui Lan, Xiaoyan Shen, Jing Yu. Influence of Reflection-Induced Retardance on the Measurement of Fabry-Perot Etalon Interval[J]. Laser & Optoelectronics Progress, 2020, 57(9): 091201.