激光与光电子学进展, 2021, 58 (5): 0500007, 网络出版: 2021-04-19
大气压大体积非平衡等离子体放电技术 
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Atmospheric Pressure and Large Volume Non-Equilibrium Plasma Discharge Technology
等离子体 辉光-弧光转换 高气压放电 高压辉光 准分子辐射源 plasmas glow-to-arc transition high-pressure discharges high-pressure glows excimer radiation source
摘要
大气压大体积非平衡等离子体技术对燃烧和激光等领域的发展起到了良好的推动作用。本文以解决大气压下放电不稳定性问题为主线，介绍了阵列式针状阴极放电、毛细管介质阻挡放电、等离子体阴极放电、微空心阴极放电以及微空心阴极辉光放电发生器的结构特点和设计思想，分析了不同放电装置的优势与不足，总结了目前实际应用中大气压大体积非平衡等离子体特性提升所面临的挑战。
Abstract
Atmospheric pressure and large volume non-equilibrium plasma technology has played a good role in promoting the development of combustion and laser fields. This article focuses on solving the problem of discharge instability at atmospheric pressure， and introduces the structural characteristics and design of array needle cathode discharge， capillary dielectric barrier discharge， plasma cathode discharge， micro hollow cathode discharge， and micro hollow cathode glow discharge generator. The advantages and disadvantages of different discharge devices has been analyzed， and the challenges facing the improvement of the characteristics of atmospheric pressure and large volume non-equilibrium plasmas in practical applications has been summarized in the article.
黄民双, 许友文, 程苗. 大气压大体积非平衡等离子体放电技术[J]. 激光与光电子学进展, 2021, 58(5): 0500007. Minshuang Huang, Youwen Xu, Miao Cheng. Atmospheric Pressure and Large Volume Non-Equilibrium Plasma Discharge Technology[J]. Laser & Optoelectronics Progress, 2021, 58(5): 0500007.
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