为了分析抛光过程中工艺参数对超快激光抛光硬脆光学材料表面的影响，基于超快激光与硬脆电介质材料的相互作用机理，根据超快激光抛光电介质材料的去除函数解析模型，建立与离焦量和入射角两个加工参数有关的单脉冲材料去除模型。利用软件并根据电介质材料多脉冲烧蚀阈值的变化规律，建立超快激光抛光硬脆光学材料的抛光计算模型，利用该模型计算超快激光在不同入射角与前进步长下对材料表面的抛光结果。此计算模型可以直观地解释超快激光抛光光学材料的抛光结果，并为选择合适的激光抛光工艺参数方法提供新的理论指导。

In order to analyze the influence of process parameters on the surface polishing results of ultrafast laser polishing hard and brittle optical materials during the polishing process， based on the interaction mechanism of ultrafast laser and hard and brittle dielectric materials， according to the analytical model of the removal function of ultrafast laser polishing dielectric materials， a single-pulse material removal model related to the two processing parameters of defocus and incident angle is established. Using the software and according to the change law of the multi-pulse ablation threshold of dielectric materials， a computational model of ultrafast-laser polishing of hard and brittle optical materials is established， and the results of ultrafast-laser polishing of the material surface under different incident angles and advance lengths are calculated by using the model. This calculation model can directly explain the results of ultrafast laser polishing optical materials， and provide new theoretical guidance for the selection of appropriate laser polishing process parameters and methods.