在氩气的保护下，用具有振镜扫描系统的500 W光纤激光器辐照预置在单晶硅基体上的纳米石墨颗粒。探究了不同激光能量密度下，受激光辐照后的转变产物显微形貌和晶体结构。用透射电镜(TEM)、拉曼光谱、X射线衍射(XRD)分析了所获产物的显微形貌和晶体度。当激光能量密度达到3.33 kJ/cm2时，转变产物的尺寸与原始颗粒尺寸相比有所增大；当激光能量密度达到4.17 kJ/cm2时，可以在样品颗粒表面观察到线状形貌；而当激光能量密度达到8.33 kJ/cm2时，产物由原始的多晶结构转变成了块状的晶体结构。实验结果表明:激光能量密度对单晶硅基体上纳米石墨颗粒显微形貌和晶体结构的转变有很大的影响。

The nano-graphite particles are preset on the silicon substrate and irradiated by 500 W fiber laser under the protection of argon gas. The micromorphology and crystal structure of transformation products after laser irradiation are studied with different laser energy densities. Transmission electron microscopy (TEM), Raman spectra and X-ray diffraction are used to analyze the micromorphology and crystallinity of transformation products. When the laser energy density reaches to 3.33 kJ/cm2, the particle sizes of the transformation products become bigger than that of the original. When the laser energy density reaches to 4.17 kJ/cm2, the linear morphology can be observed on the surface of samples. When the laser energy density reaches to 8.33 kJ/cm2, the original polycrystalline structures of transformation products is transformed into massy crystal structures. The results show that the laser energy density can significantly affect the micromorphology and crystal structure transformation of the nano-graphite particles on the silicon substrate.