中国激光, 2016, 43 (11): 1101003, 网络出版: 2016-11-10  

激光阶梯刻蚀法制备45°微反射镜及垂直耦合研究

Research on Fabrication and Vertical Coupling of 45° Micromirror with Laser Stepped Ablation Method
作者单位
1 上海大学特种光纤与光接入网省部共建重点实验室, 上海 200072
2 上海大学通信与信息工程学院, 上海 200072
摘要
提出了一种基于准分子激光制备45°微反射镜的新方法──激光阶梯刻蚀法,介绍了该方法的工艺流程。通过优化参数制备了微反射镜样品,详细分析了样品参数对微镜反射性能的影响。利用微反射镜样品进行垂直耦合实验,深入讨论了影响系统损耗的主要因素。实验结果表明,微反射镜样品造成的损耗约为3.5 dB。该制备方法有望在大尺寸光波导互连背板耦合器件的研制中得到广泛应用。
Abstract
One method to fabricate 45° micromirror based on the excimer laser, namely, the laser stepped ablation method, is proposed and its fabrication process is introduced. Via the parameter optimization, micromirror samples are obtained, and the influences of sample parameters on the reflecting performance of micromirrors are analyzed in detail. A vertical coupling experiment is conducted with these micromirror samples. The main factors that affect the system loss are discussed deeply. The experimental results indicate that the loss induced by micromirrors is approximated to 3.5 dB. The fabrication technique proposed is expected to be widely applied in the fabrication of coupling components of large size optical waveguide interconnection backplane.

邓传鲁, 宋志强, 庞拂飞, 王建辉, 王廷云. 激光阶梯刻蚀法制备45°微反射镜及垂直耦合研究[J]. 中国激光, 2016, 43(11): 1101003. Deng Chuanlu, Song Zhiqiang, Pang Fufei, Wang Jianhui, Wang Tingyun. Research on Fabrication and Vertical Coupling of 45° Micromirror with Laser Stepped Ablation Method[J]. Chinese Journal of Lasers, 2016, 43(11): 1101003.

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