中国激光, 2017, 44 (3): 0303003, 网络出版: 2017-03-08
甲烷气体探测与识别系统窄带滤光膜的研制
Study and Fabrication of Narrow-Band Filter Film in Methane Gas Detection and Recognition System
薄膜 拆分技术 逆向分析法 敏感度分布 窄带滤光膜 thin films splitting technique inverse analysis method sensitivity distribution narrow-band filter film
摘要
依据光学薄膜理论及光学材料的特性,结合膜系设计软件,采用拆分技术原理,实现了双面膜系的设计,解决了单面膜层过厚、应力过大的问题。利用逆向分析法对实验测试结果进行反演,通过对膜层敏感度分布的研究,分析了产生误差的原因。采用不同的监控方式,使膜系的敏感层厚度得以精准控制。最终研制的滤光膜光谱测试结果表明,3.31 μm单点透射率为93.7%,通带半峰全宽为49 nm,1~3.2 μm和3.4~5 μm波段平均透射率为0.17%,满足系统使用要求。
Abstract
Based on the theory of optical thin film and the characteristics of optical materials, by combining with the film system design software and using the principle of splitting technique, the design of double-sided film system is achieved, which solves the problem that the single-sided thin film is too thick and with an excessive stress. With the inverse analysis method, the experimental test results are inversed. With the research of the sensitivity distribution of film layer, the causes of the errors are analyzed, and the thickness of sensitive layers of film system is precisely controlled with different monitoring methods. The final spectral test results of prepared filter films show that the transmissivity of single point is 93.7% at the wavelength of 3.31 μm, the full width of passband at half maximum is 49 nm, and the mean transmissivity at wavebands of 1~3.2 μm and 3.4~5 μm is 0.17% , which can meet the operational requirements of the system.
熊仕富, 付秀华, 刘冬梅, 张静, 范家晨. 甲烷气体探测与识别系统窄带滤光膜的研制[J]. 中国激光, 2017, 44(3): 0303003. Xiong Shifu, Fu Xiuhua, Liu Dongmei, Zhang Jing, Fan Jiachen. Study and Fabrication of Narrow-Band Filter Film in Methane Gas Detection and Recognition System[J]. Chinese Journal of Lasers, 2017, 44(3): 0303003.