中国激光, 2018, 45 (1): 0110001, 网络出版: 2018-01-24   

亚波长金属光栅/电介质/金属混合波导传感结构的研究 下载: 725次

Research on Subwavelength Metal Grating/Dielectric/Metal Hybrid Waveguide Sensing Structure
作者单位
1 燕山大学电气工程学院测试计量技术与仪器河北省重点实验室, 秦皇岛 河北 066004
2 燕山大学信息科学与工程学院河北省特种光纤与光纤传感器重点实验室, 秦皇岛 河北 066004
摘要
提出了一种亚波长金属光栅/电介质/金属混合波导传感结构, 在结构中可产生导模共振模式、表面等离子激元共振模式和局域表面等离子体模式, 模式之间互相耦合, 从而在反射光谱中形成两个窄带共振缺陷峰。通过研究共振缺陷峰处磁场分布和结构参数对反射谱的影响, 分析了结构中的共振模式。根据导模共振原理和表面等离子体共振形成条件, 建立共振缺陷峰波长与结构参数之间的关系模型, 通过观察共振缺陷峰波长的漂移实现待测样本气体浓度的动态实时监测。以多孔硅为传感载体、甲醛气体为待测样本, 分析传感器的品质因数和灵敏度。结果表明, 两个窄带共振缺陷峰的品质因数分别可达42.3 RIU-1和78.5 RIU-1, 灵敏度分别为466 nm/RIU和628 nm/RIU。
Abstract
A subwavelength metal grating/dielectric/metal hybrid waveguide sensing structure is proposed. In the structure, the resonance mode of guided mode, surface plasmon polariton resonance mode and local surface plasmon polariton mode can be generated, and these modes are coupled with each other, resulting in two narrow band resonance defect peaks in the reflection spectrum. After studying the magnetic field distribution at the resonance defect peaks and the influence of structural parameters on the reflection spectrum, we analyze the resonance modes in the structure. According to the principle of mode resonance of guided mode and surface plasmon resonance, the relationships between the wavelength of resonance defect peaks and the structural parameters are established. The drifts of resonance peaks wavelengths are observed, and the dynamic real-time monitoring of the gas samples can be realized. The porous silicon is used as the sensing carrier, and the formaldehyde is used as the sample to be tested. The quality factor and sensitivity of the sensor are analyzed. The results shows that the quality factors of two narrow band resonance defect peaks are 42.3 RIU-1 and 78.5 RIU-1, and the sensitivities are 466 nm/RIU and 628 nm/RIU, respectively.

陈颖, 田亚宁, 何磊, 韩帅涛, 朱奇光. 亚波长金属光栅/电介质/金属混合波导传感结构的研究[J]. 中国激光, 2018, 45(1): 0110001. Chen Ying, Tian Yaning, He Lei, Han Shuaitao, Zhu Qiguang. Research on Subwavelength Metal Grating/Dielectric/Metal Hybrid Waveguide Sensing Structure[J]. Chinese Journal of Lasers, 2018, 45(1): 0110001.

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