中国激光, 2018, 45 (4): 0402006, 网络出版: 2018-04-13
飞秒激光光镊直写银微纳结构 下载: 1010次
Direct Writing of Silver Micro-Nanostructures by Femtosecond Laser Tweezer
激光技术 激光直写 光镊 飞秒激光 银微纳结构 laser technique laser direct writing laser tweezers femtosecond laser silver micro-nanostructure
摘要
利用800 nm飞秒激光光镊捕获了水中分散的银纳米颗粒,在玻璃基片表面直写银线,通过调控激光参数研究了激光功率对银线线宽及表面形貌的影响,实现了线宽为378 nm的银线直写。经过测试,直写的银线电阻率为固体银的19.88倍。此外,还利用该方法制备了银二维网格结构,体现了该技术在二维结构直写方面的良好加工能力。
Abstract
A 800 nm femtosecond laser tweezer can be used to capture the silver nanoparticles dispersed in water and the silver wires are directly written on the glass substrate. The influences of laser power on the silver wire width and surface morphology are investigated by adjusting laser parameters. The direct writing of silver wires with a width of 378 nm is realized. After tests, the electrical resistivity of the fabricated silver wire is 19.88 times that of bulk silver. In addition, a two-dimensional (2D) silver grid structure is fabricated by this technique, which manifests that this technique possesses a good process ability in the field of 2D structure direct writing.
陈忠贇, 方淦, 曹良成, 付芸, 曹洪忠, 姜肇国, 段宣明. 飞秒激光光镊直写银微纳结构[J]. 中国激光, 2018, 45(4): 0402006. Chen Zhongyun, Fang Gan, Cao Liangcheng, Fu Yun, Cao Hongzhong, Jiang Zhaoguo, Duan Xuanming. Direct Writing of Silver Micro-Nanostructures by Femtosecond Laser Tweezer[J]. Chinese Journal of Lasers, 2018, 45(4): 0402006.