中国激光, 2018, 45 (10): 1001005, 网络出版: 2018-10-12
基于空间光调制器的飞秒激光双模式快速加工 
下载： 1075次封面文章
Femtosecond Laser Dual-Mode Rapid Fabrication Based on Spatial Light Modulator
激光技术 飞秒激光 空间光调制器 焦点控制模式 图形化曝光 微纳加工 laser technique femtosecond laser spatial light modulator focus control mode patterned exposure micro-nano fabrication
摘要
提出了基于空间光调制器(SLM)的飞秒激光双模式双光子聚合加工方式。通过在空间光调制器上加载相应的全息图, 可以实现焦点控制扫描加工和图形化曝光加工模式。 这两种加工模式不但可以保证加工质量, 而且能够提高双光子聚合加工的效率。采用这两种不同的模式, 分别加工了里约奥运会会徽和不同形状的图案, 验证了这两种加工方式在微纳加工领域的可行性。
Abstract
The femtosecond laser dual-mode two-photon polymerization fabrication method based on a spatial light modulator (SLM) is proposed. The fabrication modes of focus control scanning and patterned exposure are realized by the load of the corresponding holograms on the SLM. These two fabrication modes not only ensure the fabrication quality, but also increase the fabrication efficiency of two-photon polymerization. By these two different modes, the Rio Olympic emblem and patterns with different shapes are fabricated, respectively. The feasibilities of these two fabrication methods in the micro-nano fabrication field are verified.
吴培超, 张晨初, 杨亮, 李家文, 胡衍雷, 吴东. 基于空间光调制器的飞秒激光双模式快速加工[J]. 中国激光, 2018, 45(10): 1001005. Wu Peichao, Zhang Chenchu, Yang Liang, Li Jiawen, Hu Yanlei, Wu Dong. Femtosecond Laser Dual-Mode Rapid Fabrication Based on Spatial Light Modulator[J]. Chinese Journal of Lasers, 2018, 45(10): 1001005.
PDF全文
