采用不同的飞秒激光参数(波长、脉冲能量、脉冲数量)加工碳纳米管薄膜微孔,通过拟合获得不同波长下的单脉冲烧蚀阈值,飞秒激光中心波长为1030 nm时的烧蚀阈值为25 mJ·cm -2,波长为515 nm时的烧蚀阈值为39.7 mJ·cm -2。分析了激光参数对材料加工结果的影响规律,结果表明,脉冲能量是影响烧蚀孔径的主要因素,波长较短时可以产生更大区域的碳纳米管抛出物面积。采用拉曼光谱对不同波长下切割得到的材料切口处进行测试,测试结果表明,波长为515 nm的飞秒激光更适合用于碳纳米管薄膜的切割。分析了脉冲能量与扫描速度对切割质量的影响规律,最终在优选的工艺参数下获得了良好的切割质量。

Femtosecond lasers with different parameters (wavelength, pulse energy, pulse number) are used to process micro-holes of carbon nanotubes film. A theoretical calculation of the single-pulse ablation threshold of carbon nanotubes film for different wavelengths is made by fitting experimental results. The calculation results are 25 mJ·cm -2 at a wavelength of 1030 nm and 39.7 mJ·cm -2 at a wavelength of 515 nm. The influences of laser parameters on material processing results are investigated. The results indicate that the pulse energy of the laser is the primary factor influencing the diameter of the ablation, and a larger area of carbon nanotubes thrown area can be produced by a short wavelength femtosecond laser. Raman spectroscopy is used to assess the incisions of materials cut by femtosecond lasers with different wavelengths, and the results show that a femtosecond laser with a wavelength of 515 nm is more suitable for cutting carbon nanotubes film. The influences of pulse energy and scanning speed on the cutting quality are analyzed. The desired cutting quality is obtained under the optimized process parameters.