中国激光, 2020, 47 (6): 0601007, 网络出版: 2020-06-03
大口径压电倾斜镜的反作用力分析及补偿研究 下载: 957次
Analysis and Compensation of Reaction Force in Large-Aperture Piezoelectric Fast Steering Mirror
激光光学 压电倾斜镜 多体系统刚柔耦合 压电耦合 反作用力 动量补偿 laser optics piezoelectric fast steering mirror rigid-flexible coupling piezoelectric coupling reaction force momentum compensation
摘要
针对压电快速倾斜镜的反作用力对有效光学元件的复杂动态耦合干扰问题,提出了基于多体系统的刚柔耦合和基于压电耦合理论的反作用力分析方法,对压电倾斜镜的反作用力进行了分析和补偿,并获取了中心柔性铰链的热点应力。理论和实验结果表明:压电耦合求解相比于多体系统的刚柔耦合方法更能准确地反映反作用力特性,实验测得反作用力的补偿比例可以达到90.14%,与数值计算的差异为3.96个百分点。所提的反作用力分析方法和动量补偿结构可为计算和消除倾斜镜的反作用力对光学系统的耦合干扰提供借鉴。
Abstract
In view of the complex dynamic coupling interference of the reaction force of piezoelectric fast steering mirror to the effective optical elements, we have proposed a reaction force analysis method based on rigid-flexible coupling and based on the piezoelectric coupling theory. The reaction force of the piezoelectric fast steering mirror was analyzed and compensated, and the hotspot stress of the central flexure hinge was measured. The simulation and experimental results show that the piezoelectric coupling method can be used to evaluate the reaction force characteristics more accurately than the rigid-flexible coupling method. During the experiment, the reaction force compensation ratio can become 90.14%, which is 3.96% less than that of numerical value. The proposed reaction force analysis method and momentum compensation structure could provide a reference to calculate and eliminate the coupling disturbance of the reaction force of the piezoelectric fast steering mirror to the optical system.
冉兵, 杨平, 文良华, 杨康建, 王帅, 杜睿, 许冰. 大口径压电倾斜镜的反作用力分析及补偿研究[J]. 中国激光, 2020, 47(6): 0601007. Ran Bing, Yang Ping, Wen Lianghua, Yang Kangjian, Wang Shuai, Du Rui, Xu Bing. Analysis and Compensation of Reaction Force in Large-Aperture Piezoelectric Fast Steering Mirror[J]. Chinese Journal of Lasers, 2020, 47(6): 0601007.