利用自行研制的含热传导、冲击动力学大、变形有限元程序,模拟了小尺寸梁在脉冲激光加热条件下的变形过程.在此基础上,利用商用程序模拟了冷却及残余应力的产生,研究了激光参数(强度及分布)等对于微弯曲的影响.数值模拟结果与文献中的实验观察相吻合.

In this paper, the micro-scale bending process and mechanism were studied numerically with ANSYS and a FEM code, which could be used to investigate thermal mechanical coupling and finite deformation impacting problem. The distributions and evolution of temperature, stresses and plastic strain were shown in the paper. At the same time, the effects of laser beam parameters and materials constants on the bending angle were discussed, and compared well with the experimental observations.