用解波尔兹曼输运方程的方法计算了电激励Ne-Xe-HCl混合物的电子能量分布函数和有关的输运系数,并对计算结果作了讨论。

This paper reports the calculated results of electron energy distributions and transport coefficients in a discharge-excited mixture of HCl, Xe and Ne. The effects of the mixture gas compositions and E/N values on the electron energy distributions have boon discussed. Excitation rates, ionization rates and dissociation attachment rates have boon calculated by numerically solving the Boltzmann equation, and dependences of these rates on E/N value and Xe partial pressure has been discussed.