XeCl准分子激光器激励电路性能对激光器的输出特性有着很大的影响,为了提升激光器的输出特性,我实验室自制的XeCl准分子激光器创新性地采用了火花开关控制电路,对瞬时大电流进行控制,取得了满意的效果.从激光器电路部分的设计入手,研究了XeCl准分子激光器的电路结构,确定了激光器的电路参数.针对激光器在实验过程中出现的问题,采用了过流保护、光耦合器隔离、电磁屏蔽等措施,优化了激光器的性能.实测数据表明采用的设计及改进措施使激光器激励电路工作稳定,激光器输出达到设计要求.为提高XeCl准分子激光器的输出特性提供了参考.

The stimuli circuit of the XeCl excimer laser has a great effect on the output characters of the laser. In order to improve the output character of the laser,the Spark Gap Switch（SGS） was originally and satisfactorily used to control the instant high current trigger signal of the XeCl excimer laser which was made by ourselves.To begin with, the design of the structure of the XeCl excimer laser was discussed, and then the circuit parameter of the laser was determined. Secondly,to deal with the problems in the experiments,the current foldback, optical coupler insulation and electromagnetic shielding were used to optimize the circuit performance of laser. Finally, the measured data shows that the laser worked stably and the output characters reached the design values by the improved methods.Thus it would offer the reference of. the improvement of the laser＇s output characters.