中国光学, 2017, 10 (3): 283, 网络出版: 2017-06-06   

光学自由曲面面形检测技术

Optical free-form surfaces testing technologies
作者单位
1 安徽大学 光电信息获取与控制教育部重点实验室, 安徽 合肥 230601
2 浙江大学 现代光学仪器国家重点实验室, 浙江 杭州 310027
引用该论文

张磊, 刘东, 师途, 杨甬英, 李劲松, 俞本立. 光学自由曲面面形检测技术[J]. 中国光学, 2017, 10(3): 283.

ZHANG Lei, LIU Dong, SHI Tu, YANG Yong-ying, LI Jing-song, YU Ben-li. Optical free-form surfaces testing technologies[J]. Chinese Optics, 2017, 10(3): 283.

参考文献

[1] TRICARD M. Practical examples of freeform optics[C]. Renewable Energy and the Environment Congress,OSA,2013,FT3B.2: T2B-T3B.

[2] MIANO J C,BENTEZ P,SANTAMARA A. Free-form optics for illumination[J]. Opt. Rev.,2009,16(2): 99-102.

[3] ASLANOV E,DOSKOLOVICH L L,MOISEEV M A. Thin LED collimator with free-form lens array for illumination applications[J]. Appl. Optics,2012,51(30): 7200-7205.

[4] HUA H. Past and future of wearable augmented reality displays and their applications[J]. SPIE,2014,9186: 918600-918612.

[5] CURATU C,HONG H,ROLLAND J. Dual-purpose lens for an eye-tracked projection head-mounted display[J]. SPIE,2007,6342: 63420X-7.

[6] HOWARD J M,WOLBACH S. Improving the performance of three-mirror imaging systems with Freeform Optics[C]. Freeform Optics,OSA,2013,FT2B.6: T2B-T6B.

[7] ROLT S,KIRBY A K,ROBERTSON D J. Metrology of complex astigmatic surfaces for astronomical optics[J]. SPIE,2010,7739: 139-144.

[8] 张新, 许英朝.光学自由曲面的检测方法[J].中国光学,2008,1(1): 92-99.

    ZHANG X,XU Y. Study on free-form optical testing[J]. Chinese Optics,2008,1(1): 92-99.(in Chinese)

[9] 李圣怡, 陈善勇, 戴一帆.自由曲面光学器件检测技术[J].纳米技术与精密工程,2005,3(2): 126-136.

    LI SH Y,CHEN SH Y,DAI Y F. Inspection of free-form optics[J]. Nanotechnology and Precision Engineering,2005,3(2): 126-136.(in Chinese)

[10] NEAL D R,ARMSTRONG D J,TURNER W T. Wavefront sensors for control and process monitoring in optics manufacture[J]. SPIE,1997,2993: 211-220.

[11] PULASKI P D,ROLLER J P,NEAL D R. Measurement of aberrations in microlenses using a Shack-Hartmann wavefront sensor[J]. SPIE,2002,4767: 44-52.

[12] JEONG T M,MENON M,YOON G. Measurement of wave-front aberration in soft contact lenses by use of a Shack-Hartmann wave-front sensor[J]. Appl. Optics,2005,44(21): 4523-4527.

[13] GUO W,ZHAO L,TONG C S,et al.. Adaptive centroid-finding algorithm for freeform surface measurements[J]. Appl. Optics,2013,52(10): 75-83.

[14] 吴青青, 张效栋, 房丰洲, 等.基于波前传感法的立方相位板面形测量[J].光学技术,2014(2): 105-112.

    WU Q,ZHANG X,FANG F,et al.. Shape measurement of the cubic phase plate with wavefront sensing technology[J]. Optical Technique,2014(2): 105-112.(in Chinese)

[15] 赵必玉.高精度面结构光三维测量方法研究[D].成都: 电子科技大学,2015.

    ZHAO B Y. High acuracy surface structured light projection three dimensional measurement[D]. Chengdu: University of Electronic Science and Technology of China,2015.(in Chinese)

[16] NGUYEN H,NGUYEN D,WANG Z,et al.. Real-time, high-accuracy 3D imaging and shape measurement[J]. Appl. Optics,2014,54(1): A9-A17.

[17] WANG Z,DU H,BI H. Out-of-plane shape determination in generalized fringe projectionprofilometry[J]. Opt. Express,2006,14(25): 12122-12133.

[18] DU H,WANG Z. Three-dimensional shape measurement with an arbitrarily arranged fringe projection profilometry system[J]. Opt. Lett.,2007,32(16): 2438-2440.

[19] HOANG T,PAN B,NGUYEN D,et al.. Generic gamma correction for accuracy enhancement in fringe-projection profilometry[J]. Opt. Lett.,2010,35(12): 1992-1994.

[20] VO M,WANG Z,HOANG T,et al.. Flexible calibration technique for fringe-projection-based three-dimensional imaging[J]. Opt. Lett.,2010,35(19): 3192-3194.

[21] WANG Z,NGUYEN D A,BARNES J C. Some practical considerations in fringe projection profilometry[J]. Optics & Lasers in Engineering,2010,48(2): 218-225.

[22] WANG Z,DU H,PARK S,et al.. Three-dimensional shape measurement with a fast and accurate approach[J]. Appl. Optics,2009,48(6): 1052-1061.

[23] WANG Z,HANB. Advanced iterative algorithm for phase extraction of randomly phase-shifted interferograms[J]. Opt. Lett.,2004,29(14): 1671-1673.

[24] ZHANG S,HUANG P S. Novel method for structured light system calibration[J]. Opt. Eng.,2006,45(8): 83601.

[25] ZHANG S,HUANG P S. Phase error compensation for a 3-D shape measurement system based on the phase-shifting method[J]. SPIE,2005,6000: 60000E-12.

[26] HUANG P S,ZHANG C,CHIANG F P. High-speed 3-D shape measurement based on digital fringe projection[J]. Opt. Eng.,2003,42(1): 163-168.

[27] 徐红兵, 任乃飞.基于Atos的光学扫描测量[J].工具技术,2006,40(11): 74-77.

    XU H,REN N. Measuring based on Atos optical scanner[J]. Tool Engineering,2006,40(11): 74-77.(in Chinese)

[28] 张潇予.基于ATOS扫描的异形件形貌检测与逆向技术研究[D].长春: 长春理工大学,2014.

    ZHANG X Y. Based on the atos profiled morphorpholgy detection and reverse technology research[D]. Changchun: Changchun University of Science and Technology,2014.(in Chinese)

[29] ZUO C,CHEN Q,GU G,et al.. High-speed three-dimensional profilometry for multiple objects with complex shapes[J]. Opt. Express,2012,20(17): 19493-19510.

[30] ZHONG M,SU X,CHEN W,et al.. Modulation measuring profilometry with auto-synchronous phase shifting and vertical scanning[J]. Opt. Express,2014,22(26): 31620-31634.

[31] XIAO Y L,XUE J,SU X. Robust self-calibration three-dimensional shape measurement in fringe-projection photogrammetry[J]. Opt. Lett.,2013,38(5): 694-696.

[32] OLESCH E,HUSLER G,WRNLEIN A,et al.. Deflectometric measurement of large mirrors[J]. Advanced Optical Technologies,2014,3(3): 335-343.

[33] SU T,MALDONADO A,SU P,et al.. Instrument transfer function of slope measuring deflectometry systems[J]. Appl. Optics,2015,54(10): 2981-2990.

[34] SPECK A,ZELZER B,KANNENGIEβER M,et al.. Inspection of freeform intraocular lens topography by phase measuring deflectometric methods[J]. Appl. Optics,2013,52(18): 4279-4286.

[35] HUANG L,NG C S,ASUNDI A K. Fast full-field out-of-plane deformation measurement using fringe reflectometry[J]. Optics & Lasers in Engineering,2012,50(4): 529-533.

[36] PAN B,XIE H,WANG Z. Equivalence of digital image correlation criteria for pattern matching[J]. Appl. Optics,2010,49(28): 5501-5509.

[37] PAN B,XIE H,WANG Z,et al.. Study on subset size selection in digital image correlation for speckle patterns[J]. Opt. Express,2008,16(10): 7037-7048.

[38] TANG Y,SU X,HU S. Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly[J]. Appl. Optics,2011,50(31): 5944-5948.

[39] HUSLER G,FABER C,ETTL S. Deflectometry vs. interferometry[J]. SPIE,2013,8788: 87881C.

[40] YAO J,ROLLAND J P. Freeform optics metrology using optical coherence tomography[C]. Optical Fabrication and Testing,2014,DOI: 10.1364/OFT2014.OW3B.4: W3B-W4B.

[41] YAO J,XU D,ROLLAND J P. Freeform metrology using swept-source optical coherence tomography with custom pupil-relay precision scanning configuration[J]. SPIE,2015,9633: 96331A.

[42] DI X,YAO J,ZHAO N,et al.. Scanning customized Swept-source Optical Coherence Tomography(SS-OCT) for the metrology of freeform optical surfaces[C]. Frontiers in Optics,2016,DOI: 10.1364/FIO.2016.FW5H.6.

[43] 师途, 杨甬英, 张磊, 等.非球面光学元件的面形检测技术[J].中国光学,2014,7(1): 26-46.

    SHI T,YANG Y,ZHANG L,et al.. Surface testing methods of aspheric optical elements[J]. Chinese J. Optics,2014,7(1): 26-46.(in Chinese)

[44] OFFNER A. A null corrector for paraboloidal mirrors[J]. Appl. Optics,1963,2(2): 153-155.

[45] VEZIN W R. Wavefront errors in the small lens dall null-test-corrigendum[J]. J. British Astronomical Association,1982: 92.

[46] MACGOVERN A J,WYANT J C. Computer generated holograms for testing optical elements[J]. Appl. Optics,1971,10(3): 619-624.

[47] LIU D,YANG Y,TIAN C,et al.. Practical methods for retrace error correction in nonnull aspheric testing[J]. Opt. Express,2009,17(9): 7025-7035.

[48] 高峰, 朱建华, 黄奇忠, 等.电子束直写计算全息图[J].中国激光,2001,28(6): 556-558.

    GAO F,ZHU J,HUANG Q,et al.. Computer-generated hologram fabricated by electron-beam direct-writing[J]. Chinese J. Lasers,2001,28(6): 556-558.(in Chinese)

[49] 李明.基于CGH的非球面混合补偿检测及离轴光学系统装调的关键技术研究[D].长春: 中国科学院研究生院(长春光学精密机械与物理研究所),2015.

    LI M. Research on key technology of hybrid null testing of aspheric mirror and off-axis optical system alignment based on CGH[D]. Changchun: Changchun Institute of optics,fine mechanics and Physics,2015.(in Chinese)

[50] ZHOU P,BURGE J H. Fabrication error analysis and experimental demonstration for computer-generated holograms[J]. Appl. Optics,2007,46(5): 657-663.

[51] ZHAO C,ZEHNDER R,BURGE J H,et al.. Testing an off-axis parabola with a CGH and a spherical mirror as null lens[J]. Optical Manufacturing & Testing VI,2005: 5869.

[52] PETERHNSEL S,PRUSS C,OSTEN W. Phase errors in high line density CGH used for aspheric testing: beyond scalar approximation[J]. Opt. Express,2013,21(10): 11638-11651.

[53] REICHELT S,PRUSS C,TIZIANI H J. Absolute interferometric test of aspheres by use of twin computer-generated holograms[J]. Appl. Optics,2003,42(22): 4468-4479.

[54] FENG J,DENG C,XING T. Design of aspheric surfaces testing system based on computer-generated holograms[J]. SPIE,2012,8418: 84180R-9.

[55] FENG J,DENG C,XING T. Design and location deviation of the computer generated holograms used for aspheric surface testing[J]. SPIE,2013,8788: 878820-7.

[56] 赵龙波, 张志宇, 朱德燕, 等.用于非球面检验的激光直写高精度计算全息图制作[J].激光与光电子学进展,2014(11): 122-128.

    ZHAO L B,ZHANG ZH Y,ZHU D Y,et al.. Fabrication of high precision computer generated hologram for aspheric surface testing by laser-direct writing[J]. Laser & Optoelectronics Progress,2014(11): 122-128.(in Chinese)

[57] 卢振武, 李凤有, 刘华, 等.利用曲面计算全息图进行凸面非球面检测[J].光电子·激光,2004,15(9): 1088-1090.

    LU ZH W,LI F Y,LIU H,et al.. Testing the convex aspheric surface by using CGH on curved surface[J]. J. Optoelectronics·Laser,2004,15(9): 1088-1090.(in Chinese)

[58] 席庆奎, 朱日宏, 陈磊, 等.计算全息用于非球面检测的方法[J].激光杂志,2004,25(6): 67-69.

    XI Q K,ZHU R H,CHEN L,et al.. Methods on testing an aspheric with a computer generated hologram[J]. Laser Journal,2004,25(6): 67-69.(in Chinese)

[59] 王小鹏, 高志山, 马骏, 等.非球面测量中零位计算全息的测量不确定度分析研究[J].光学学报,2011,31(1): 111-115.

    WANG X P,GAO ZH SH,MA J,et al.. Investigation of measurement uncertainty of aspheric surface based on null-computer-generated holography[J]. Acta Optica Sinica,2011,31(1): 111-115.(in Chinese)

[60] KINO M,KURITA M. Interferometric testing for off-axis aspherical mirrors with computer-generated holograms[J]. Appl. Optics,2012,51(19): 4291-4297.

[61] 苏萍, 谭峭峰, 康果果, 等.自由曲面零补偿计算全息图离散相位的B样条拟合[J].光学学报,2010(6): 1767-1771.

    SU P,TAN Q F,KANG G G,et al.. B-spline interpolation of scattered phase data of computer generated hologram for null test of freeform surface[J]. Acta Optica Sinica,2010(6): 1767-1771.(in Chinese)

[62] LIU H,LU Z,LI F,et al.. Using curved hologram to test large-aperture convex surface[J]. Opt. Express,2004,12(14): 3251-3256.

[63] LIU H,LU Z,LI F,et al.. Design of a novel hologram for full measurement of large and deep convex aspheric surfaces[J]. Opt. Express,2007,15(6): 3120-3126.

[64] 黎发志, 郑立功, 闫锋, 等.自由曲面的CGH光学检测方法与实验[J].红外与激光工程,2012,41(4): 1052-1056.

    LI F ZH,ZHENG L G,YAN F,et al.. Optical testing method and its experiment on freeform surface with computer-generated hologram[J]. Infrared and Laser Engineering,2012,41(4): 1052-1056.(in Chinese)

[65] 朱德燕, 张学军.高精度相位型计算全息图的设计[J].光学学报,2015,35(7): 174-180.

    ZHU D,ZHANG X. Design of high-precision phase computer-generated-hologram[J]. Acta Optica Sinica,2015,35(7): 174-180.(in Chinese)

[66] 黄亚, 马骏, 朱日宏, 等.基于计算全息的光学自由曲面测量不确定度分析[J].光学学报,2015(11): 156-164.

    HUANG Y,MA J,ZHU R H,et al.. Investigation of measurement uncertainty of optical freeform surface based on computer-generated hologram[J]. Acta Optica Sinica,2015(11): 156-164.(in Chinese)

[67] LIU H,ZHU Q,HAO Q. Design of novel part-compensating lens used in aspheric testing[J]. SPIE,2003,5253: 480-484.

[68] SULLIVAN J J,GREIVENKAMP J E. Design of partial nulls for testing of fast aspheric surfaces[J].SPIE,2007,6671: 66710W.

[69] LIU D,YANG Y,LUO Y,et al.. Non-null interferometric aspheric testing with partial null lens and reverse optimization[J]. SPIE,2009,7426: 74260M-8.

[70] LIU D,SHI T,ZHANG L,et al.. Reverse optimization reconstruction of aspheric figure error in a non-null interferometer[J]. Appl. Optics,2014,53(24): 5538-5546.

[71] 师途, 刘东, 张磊, 等.非球面非零位检测的逆向优化面形重构[J].光学学报,2014(6): 143-150.

    SHI T,LIU D,ZHANG L,et al.. Reverse optimization reconstruction method for aspheric testing in a nonnull interferometer[J]. Acta Optica Sinica,2014(6): 143-150.(in Chinese)

[72] GARBUSI E,PRUSS C,LIESENER J,et al.. New technique for flexible and rapid measurement of precision aspheres[J]. SPIE,2007,6616: 661629-11.

[73] GARBUSI E,PRUSS C,OSTEN W. Interferometer for precise and flexible asphere testing[J]. Opt. Lett.,2008,33(24): 2973-2975.

[74] BAER G,SCHINDLER J,PRUSS C,et al.. Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces[J]. J. European Optical Society Rapid Publications,2013,8(23): 6480-6484.

[75] BAER G,SCHINDLER J,PRUSS C,et al.. Fast and flexible non-null testing of aspheres and free-form furfaces with the tilted-wave-interferometer[J]. Int. J. Optomechatroni.,2014,8(4): 242-250.

[76] 荣四海.点光源阵列多重波面自由曲面检测系统设计与研究[D].南京: 南京理工大学,2013.

    RONG S H. Design and research of the point source multi-wavefront interferometer system[D]. Nanjing: Nanjing University of Science&Technology,2013.(in Chinese)

[77] 沈华.基于多重倾斜波面的光学自由曲面非零位干涉测量关键技术研究[D].南京: 南京理工大学,2014.

    SHEN H.Research on key techniques of tilted wave Interferometer used in the measurement of freeform surfaces[D]. Nanjing: Nanjing University of Science & Technology,2014.(in Chinese)

[78] KIN C J,WYANT J C. Subaperture test of a large flat or a fast aspheric surface[J]. J. Optical Society of America,1981,71: 1587.

[79] MURPHY P,FLEIG J,FORBES G,et al.. Subaperture stitching interferometry for testing mild aspheres[J]. Optics & Photonics,2006: 62930J.

[80] CHOW WW,LAWRENCE G N. Method for subaperture testing interferogram reduction[J]. Opt. Lett.,1983,8(9): 68-470.

[81] MURPHY P,FORBES G,FLEIG J,et al.. Stitching interferometry: a flexible solution for surface metrology[J]. Optics & Photonics News,2003,14(5): 38-43.

[82] 程灏波.精密光学元件先进测量与评价[M].北京: 科学出版社,2014.

    CHENG H B. Advanced Measurement and Evaluate of Precision Optical Elements[M]. Beijing: Science Press,2014.(in Chinese)

[83] TRICARD M,KULAWIEC A,BAUER M,et al.. Subaperture stitching interferometry of high-departure aspheres by incorporating a variable optical null[J]. CIRP Annals-Manufacturing Technology,2010,59(1): 547-550.

[84] MURPHY P,DEVRIES G,FLEIG J,et al.. Measurement of high-departure aspheric surfaces using subaperture stitching with variable null optics[J]. SPIE,2009,7426: 74260P-10.

[85] 闫力松.子孔径拼接干涉检测光学镜面算法的研究[D].北京: 中国科学院大学,2015.

    YAN L S. Research on the algorithm testing optical mirror by subaperture stitching interferometry[D]. Beijing: University of Chinese Academy of Sciences,2015.(in Chinese)

[86] 陈善勇.非球面子孔径拼接干涉测量的几何方法研究[D].长沙: 国防科学技术大学,2006.

    CHEN SH Y. Geometrical approach to subaperture stitching interferometry for aspheric surfaces[D]. Changsha: National University of Defense Technology,2006.(in Chinese)

[87] LIU Y M,LAWRENCE G N,KOLIOPOULOS C L. Subaperture testing of aspheres with annular zones[J]. Appl. Optics,1988,27(21): 4504-4513.

[88] MELOZZI A M,PEZZATI L,MAZZONI A. Testing aspheric surfaces using multiple annular interferograms[J]. Opt. Eng.,1993,32(32): 1073-1079.

[89] GRANADOS-AGUST IAN F I,ESCOBAR-ROMERO J F,CORNEJO-RODR IAGUEZ A. Testing Parabolic Surfaces with Annular Subaperture Interferograms[J]. Opt. Rev.,2004,11(2): 82-86.

[90] HOU X,WU F,YANG L,et al.. Full-aperture wavefront reconstruction from annular subaperture interferometric data by use of Zernike annular polynomials and a matrix method for testing large aspheric surfaces[J]. Appl. Optics,2006,45(15): 3442-3455.

[91] HOU X,WU F,YANG L,et al.. Experimental study on measurement of aspheric surface shape with complementary annular subaperture interferometric method[J]. Opt. Express,2007,15(20): 12890-12899.

[92] CHEN S,LI S,DAI Y,et al.. Experimental study on subaperture testing with iterative stitching algorithm[J]. Opt. Express,2008,16(7): 4760-4765.

[93] 王孝坤, 王丽辉, 张学军.子孔径拼接干涉法检测非球面[J].光学 精密工程,2007,15(2): 192-198.

    WANG X K,WANG L H,ZHANG X J. Testing asphere by subaperture stitching interferometric method[J]. Opt. Precision Eng.,2007,15(2): 192-198.(in Chinese)

[94] KCHEL M F. Interferometric measurement of rotationally symmetric aspheric surfaces[J]. SPIE,2009,7389: 738916-11.

[95] 张磊, 田超, 刘东, 等.非球面非零位环形子孔径拼接干涉检测技术[J].光学学报,2014,34(8): 156-164.

    ZHANG L,TIAN CH,LIU D,et al.. Non-null annular subaperture stitching interferometry for aspheric test[J]. Acta Optica Sinica,2014,34(8): 156-164.(in Chinese)

[96] 田超.非球面非零位环形子孔径拼接干涉检测技术与系统研究[D].杭州: 浙江大学,2013.

    TIAN CH. Measurement of Aspheric Surfaces by Non-null Annular Subaperture Stitching Interferometry[D]. Hangzhou: Zhejiang University,2013.(in Chinese)

[97] ZHANG L,TIAN C,LIU D,et al.. Non-null annular subaperture stitching interferometry for steep aspheric measurement[J]. Appl. Optics,2014,53(25): 5755-5762.

[98] ZHANG L,LIU D,SHI T,et al.. Aspheric subaperture stitching based on system modeling[J]. Opt. Express,2015,23(15): 19176-19188.

[99] WANG X,ZHENG L,ZHANG B,et al.. Test of an off-axis asphere by subaperture stitching interferometry[J]. SPIE,2009,7283: 72832J-6.

[100] CHEN S,ZHAO C,DAI Y,et al.. Reconfigurable optical null based on counter-rotating Zernike plates for test of aspheres[J]. Opt. Express,2014,22(2): 1381-1386.

[101] 张磊.光学自由曲面子孔径拼接干涉检测技术[D].杭州: 浙江大学,2016.

    ZHANG L.Optical free-form surface subaperture stitching interferometry[D]. Hangzhou: Zhejiang University,2016.(in Chinese)

[102] LIU D,ZHOU Y,BAI J,et al.. Aspheric and free-form surfaces test with non-null subaperture stitching interferometry[C]. SPIE/COS Photonics Asia2016,2016: 10021N.

张磊, 刘东, 师途, 杨甬英, 李劲松, 俞本立. 光学自由曲面面形检测技术[J]. 中国光学, 2017, 10(3): 283. ZHANG Lei, LIU Dong, SHI Tu, YANG Yong-ying, LI Jing-song, YU Ben-li. Optical free-form surfaces testing technologies[J]. Chinese Optics, 2017, 10(3): 283.

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