[1] . 椭偏透射法测量氢化非晶硅薄膜厚度和光学参数[J]. 物理学报, 2008, 57(3): 1542-1547.

    . Thickness and optical constant determination of hydrogenated amorphous silicon thin film from transmittance spectra of ellipsometer[J]. Acta Physica Sinica, 2008, 57(3): 1542-1547.

[2] . 椭偏与光度法联用精确测定吸收薄膜的光学常数与厚度[J]. 物理学报, 2010, 59(4): 2356-2363.

    . Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectro-photometry approach[J]. Acta Physica Sinica, 2010, 59(4): 2356-2363.

[3] . 椭偏光谱法研究溶胶凝胶TiO2薄膜的光学常数[J]. 物理学报, 2009, 58(11): 8027-8032.

    . Optical constants of sol-gel derived TiO2 films characterized by spectroscopic ellipsometry[J]. Acta Physica Sinica, 2009, 58(11): 8027-8032.

[4] 王党社. 类金刚石薄膜光学特性测量与参数反演［D］.西安: 西安电子科技大学, 2006

    Wang Dangshe. Inversion and Measurement of Optical Parameter of DLC Film［D］. Xi′an: Xidian University, 2006

[5] 廖清君, 王植恒, 王磊. 模拟退火法在吸收薄膜的椭偏反演算法中的应用［J］. 光学学报, 2002, 22(6): 683～687

    Liao Qingjun, Wang Zhiheng, Wanglei. Ellipsometric data inversion of absorbing films by simulated annealing［J］. Acta Optica Sinica, 2002, 22(6): 683～687

[6] 阳生红, 余招贤, 李辉遒. 模拟退火法在椭偏光谱数值反演中的应用［J］. 红外与毫米波学报, 2000, 19(5): 338～342

    Yang Shenghong, Yu Zhaoxian, Li Huiqiu. Simulated annealing optimization algorithm for inverting ellipsometric spectr［J］. Journal of Infrared and Millimeter Waves, 2000, 19(5): 338～342

[7] Chemishkian S., Arabyan A.. Intelligent algorithms for optimal placement of actuators and sensors in structural control［C］. American Control Conference. IEEE Piscataway, 1999, 3: 1812～1816

[8] . Martin, J. Rivory, M. Schoenauer. Synthesis of optical multilayer systems using genetic algorithms[J]. Appl. Opt., 1995, 34(13): 2247-2254.

[9] 王强, 沈国土, 杨宝成 等. 遗传算法在光栅面形优化设计中的应用［J］. 红外与激光工程, 2005, 34(4): 410～414

    Wang Qiang, Shen Guotu, Yang Baocheng et al.. Application of genetic algorithm in the design optimization of grating profile［J］. Infrared and Laser Engineering, 2005, 34(4): 410～414

[10] Goldberg D. E.. Genetic Algorithms in Search, Optimization and Machine Learning［M］. Massadusetts: Addison-Wesley Professional, 1989. 1～83

[11] 李明. 遗传算法的改进及其在优化问题中的应用研究 ［D］.吉林: 吉林大学, 2004

    LI Ming. The Study on Improved Genetic Algorithm and Its Application in Optimization Questions［D］. Jilin: Jilin University, 2004

[12] . 基于改进的选择算子和交叉算子的遗传算法[J]. 计算机技术与发展, 2010, 20(2): 44-51.

    . A genetic algorithm based on modified selection operator and crossover operator[J]. Computer Technology and Development, 2010, 20(2): 44-51.

[13] Born M., Wolf E.. Principles of Optics［M］. New York: Oxford,1989