光学学报, 1985, 5 (7): 625, 网络出版: 2011-09-16
红外减反射膜热处理条件和机理研究
Effects of heat treatment on properties of IR anti-reflection coatings
摘要
本文采用在不同气氛中加热处理红外减反射膜的方法,研究了氟化物薄膜的水吸收峰和氧化物吸收峰对光学性能的影响。并讨论了机理和热处理的条件。
Abstract
In this paper the effects of absorption peaks on the optical properties of some fluoride films after heat treatment (or moisture removal) are investigated in different gases. The mechanism of heat treatment in improving stability and hardness of the films is discussed.
李忠奇. 红外减反射膜热处理条件和机理研究[J]. 光学学报, 1985, 5(7): 625. La ZHONGQI. Effects of heat treatment on properties of IR anti-reflection coatings[J]. Acta Optica Sinica, 1985, 5(7): 625.
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