光学学报, 2000, 20 (5): 642, 网络出版: 2006-08-09
导波法测量吸收薄膜的复介电系数和厚度
Determination of the Complex Dielectric Coefficient and Thickness of Absorbing Films Using Guided Waves
导波法 吸收薄膜 复介电系数 衰减全反射。 guided wave absorbing film complex dielectric coefficient attenuated-total-reflections.
摘要
具有吸收特性的波导薄膜,其衰减全反射(ATR)峰的位置和形状包含了薄膜诸多特征参数的信息。在同时考虑棱镜的耦合和材料的吸收的基础上,本文用一阶微扰理论推导了微扰传播常数的解析公式,并且介绍了通过分析薄膜的衰减全反射峰来计算吸收薄膜的复介电系数和厚度的方法。
Abstract
The attenuated-total-reflections (ATR) of absorbing films contain much characteristic information about the films.Taking considerations of the prism coupling and film absorbing,the first-order perturbation theory is applied to deduce the simplified analytical expressions of the perturbed propagation constants.Based on the theory,a method is introduced for determining the complex dielectric coefficients and thicknesses by detecting and analyzing the attenuated-total-reflections of absorbing films.
蒋毅, 曹庄琪, 沈启舜, 陈英礼. 导波法测量吸收薄膜的复介电系数和厚度[J]. 光学学报, 2000, 20(5): 642. 蒋毅, 曹庄琪, 沈启舜, 陈英礼. Determination of the Complex Dielectric Coefficient and Thickness of Absorbing Films Using Guided Waves[J]. Acta Optica Sinica, 2000, 20(5): 642.
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