在自行研制的导流型热蒸发沉积装置上开展了微球表面聚酰胺酸(PAA)涂层制备工艺研究。探讨了单体原料处理和改变升温过程对沉积速率的影响。两种单体分别采用两个相互独立的蒸发源加热蒸发，使用两个晶振膜厚测量探头,通过对膜厚探头、样品盘和导流管端头三者的空间位置和对称关系的调整和实验标定，实现了两种单体近似等化学计量比的沉积。采用间歇性压电振动或敲击配合样品盘的旋转作为微球运动的激励方式，在聚-α-甲基苯乙烯(PAMS)微球上制备出均匀的表面质量好的PAA涂层。

In this paper, a study on the oriented thermal vapor deposition device which is used for coating microspheres with polyamic acid(PAA) is developed. Influences of the processing of monomer material and the adjusting of heating process on the deposition rate are discussed. Two different monomers are poured into two evaporators and evaporated independently, the deposition rate and film thickness are measured via two film thickness measuring probes with the crystal vibration. Space position and symmetry of sample pan, two probes and the oriented tube tip are adjusted so that two monomers’ deposition ratio approximates to stoichiometric ratio. High quality coating of PAA on poly-aipha-methylstyrene microsphere is acquired by intermittent piezoelectricity vibration or striking which accompanies rotating of the sample pan.