光子学报, 2017, 46 (1): 0116002, 网络出版: 2017-02-09   

银铜双原子MACE法可控制备倒金字塔多晶黑硅的结构与性能

Structures and Properties of Black Multicrystalline Silicon with a Structure of Invert Pyramid Prepared Controllably by Ag and Cu Dually Assisted Chemical Etching Method
作者单位
1 南京航空航天大学 材料科学与技术学院 江苏省能量转换材料与技术重点实验室, 南京 210016
2 江苏辉伦太阳能科技有限公司, 南京 210061
引用该论文

郑超凡, 沈鸿烈, 蒲天, 蒋晔, 李玉芳, 唐群涛, 杨楠楠, 金磊. 银铜双原子MACE法可控制备倒金字塔多晶黑硅的结构与性能[J]. 光子学报, 2017, 46(1): 0116002.

ZHENG Chao-fan, SHEN Hong-lie, PU Tian, JIANG Ye, LI Yu-fang, TANG Qun-tao, YANG Nan-nan, JIN Lei. Structures and Properties of Black Multicrystalline Silicon with a Structure of Invert Pyramid Prepared Controllably by Ag and Cu Dually Assisted Chemical Etching Method[J]. ACTA PHOTONICA SINICA, 2017, 46(1): 0116002.

参考文献

[1] 蒋晔, 沈鸿烈, 岳之浩, 等. 黑硅与黑硅太阳电池的研究进展[J]. 人工晶体学报, 2012(S1): 254-259.

    JIANG Ye, SHEN Hong-lie, YUE Zhi-hao, et al. Research progress of the back silicon and black silicon solar cells[J]. Journal of Synthetic Crystals, 2012, (S1): 254-259.

[2] HER Tsing-hua, FINLAY R J, WU C, et al. Microstructuring of silicon with femtosecond laser pulses[J]. Applied Physics Letters, 1998, 73(12): 1673-1675.

[3] PENG Kui-qing, LU A, ZHANG R, et al. Motility of metal nanoparticles in silicon and induced anisotropic silicon etching[J]. Advanced Functional Materials, 2008, 18(19): 3026-3035.

[4] 虞栋, 王申, 郦莉, 等. 铜辅助单步化学刻蚀多晶硅[J]. 微纳电子技术, 2014, 51(004): 249-256.

    YU Dong, WANG Shen, LI li, et al. One-step Cu-assisted chemical etching on polycrystalline silicon[J]. Micronanoelectronic Technology, 2014, 51(004): 249-256.

[5] 林龙, 邓振波, 刘贤德.银纳米颗粒对聚合物太阳能电池性能的提高[J].发光学报, 2015,36(4):449-453.

    LIN Long, DENG Zhen-bo, LIU Xian-de. Improvement of Ag NPs to the performance of polymer solar cells[J]. Chinese Journal of Luminescence, 2015, 36(4): 449-453.

[6] 陈云龙, 郑加金, 蒋宇宠.镀膜法改善有机薄膜太阳能电池光学性能[J].发光学报, 2014,35(6):710-716.

    CHEN Yun-long, ZHENG Jian-jin, JIANG Yu-hong. Optical performance improving of organic film solar cell by multiple surface coating[J]. Chinese Journal of Luminescence, 2014, 35(6): 710-716.

[7] 白昱, 郭晓阳, 刘星元.利用蛾眼结构提高有机太阳能电池光吸收效率的理化研究[J].发光学报,2015,36(5):539-544.

    BAI Yu, GUO Xiao-yang, LIU Xing-yuan. Theoretical study on the improvement of light absorption efficiency of organic solar cells by moth eye structure[J]. Chinese Journal of Luminescence, 2015, 36(5): 539-544.

[8] OH J, BRANZ H M, YUAN H C. An 18.2%-efficient black-silicon solar cell achieved through control of carrier recombination in nanostructures[J]. Nature Nanotechnology, 2012, 7(11): 743-748.

[9] CHEN H Y, LU H L, REN Q H, et al. Enhanced photovoltaic performance of inverted pyramid-based nanostructured black-silicon solar cells passivated by an atomic-layer-deposited Al2O3 layer[J]. Nanoscale, 2015, 7(37): 15142-15148.

[10] YE Xiao-yan, ZOU S, CHEN K, et al. 18.45% efficient multi crystalline silicon solar cells with novel nanoscale pseudo pyramid texture[J]. Advanced Functional Materials, 2014, 24(42): 6708-6716.

[11] 张力典, 沈鸿烈, 岳之浩. 多晶硅减反射复合结构的制备与性能[J]. 光学学报, 2013, 33(6): 341-346.

    ZHANG Li-dian, SHEN Hong-lie, YUE Zhi-hao. Preparation and property of antireflective complex structures on multicrystalline silicon surface[J]. Acta Optica Sinica, 2013, 33(6): 341-346.

[12] KUMAGAI A. Texturization using metal catalyst wet chemical etching for multicrystalline diamond wire sawn wafer[J]. Solar Energy Materials and Solar Cells, 2015, 133: 216-222.

[13] CHUNG Chun-hui, LE V N. Depth of cut per abrasive in fixed diamond wire sawing[J]. The International Journal of Advanced Manufacturing Technology, 2015, 80(5-8): 1337-1346.

[14] LI Ping, WEI Y, ZHAO Z, et al. Highly efficient industrial large-area black silicon solar cells achieved by surface nanostructured modification[J]. Applied Surface Science, 2015, 357: 1830-1835.

[15] BRANZ H M, YOST V E, WARD S, et al. Nanostructured black silicon and the optical reflectance of graded-density surfaces[J]. Applied Physics Letters, 2009, 94(23): 231121.

[16] WU Yi, GAO F, WU H, et al. The effects of Ag particle morphology on the antireflective properties of silicon textured using Ag-assisted chemical etching[J]. Journal of Alloys and Compounds, 2016, 670: 156-160.

[17] JIA Guo-bin, WESTPHALEN J, DREXLER J, et al. Ordered silicon nanowire arrays prepared by an improved nanospheres self-assembly in combination with Ag-assisted wet chemical etching[J]. Photonics and Nanostructures-Fundamentals and Applications, 2016, 19: 64-70.

[18] TOOR F, OH J, BRANZ H M. Efficient nanostructured ‘black’ silicon solar cell by copper catalyzed metal assisted etching[J]. Progress in Photovoltaics: Research and Applications, 2015, 23(10): 1375-1380.

郑超凡, 沈鸿烈, 蒲天, 蒋晔, 李玉芳, 唐群涛, 杨楠楠, 金磊. 银铜双原子MACE法可控制备倒金字塔多晶黑硅的结构与性能[J]. 光子学报, 2017, 46(1): 0116002. ZHENG Chao-fan, SHEN Hong-lie, PU Tian, JIANG Ye, LI Yu-fang, TANG Qun-tao, YANG Nan-nan, JIN Lei. Structures and Properties of Black Multicrystalline Silicon with a Structure of Invert Pyramid Prepared Controllably by Ag and Cu Dually Assisted Chemical Etching Method[J]. ACTA PHOTONICA SINICA, 2017, 46(1): 0116002.

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