微机构可调谐阵列滤光片的有限元分析
陈旻, 刘旭, 李海峰. 微机构可调谐阵列滤光片的有限元分析[J]. 光学学报, 2002, 22(3): 344.
Chen Min, Liu Xu, Li Haifeng. Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique[J]. Acta Optica Sinica, 2002, 22(3): 344.
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陈旻, 刘旭, 李海峰. 微机构可调谐阵列滤光片的有限元分析[J]. 光学学报, 2002, 22(3): 344. Chen Min, Liu Xu, Li Haifeng. Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique[J]. Acta Optica Sinica, 2002, 22(3): 344.