激光技术, 2015, 39 (4): 497, 网络出版: 2015-07-10   

基于激光散斑角度相关法表面粗糙度测量

Measurement of surface roughness based on laser angular-speckle correlation method
作者单位
1 长春理工大学 光电工程学院,长春 130022
2 中国科学院 长春光学精密机械与物理研究所, 长春 130033
引用该论文

陈晨, 郭晓明, 马军, 王文生. 基于激光散斑角度相关法表面粗糙度测量[J]. 激光技术, 2015, 39(4): 497.

CHEN Chen, GUO Xiaoming, MA Jun, WANG Wensheng. Measurement of surface roughness based on laser angular-speckle correlation method[J]. Laser Technology, 2015, 39(4): 497.

参考文献

[1] ZHOU L L, ZHAO X Z. In-process measurement of surface roughness using laser and other techniques[J]. Laser Journal, 2004, 25(3): 4-8(in Chinese).

[2] WANG Zh P, ZHANG X F, ZHANG Y N. Progress on optical measurement of surface roughness[J]. Transducer and Microsystem Technologies, 2007, 26(9): 4-6(in Chinese).

[3] BERND R. Application of speckle-correlation methods to surface-roughness measurement: a theoretical study [J]. Journal of the Optical Society of America, 1986,3(8): 1297-1304.

[4] LIU H B, ZHOU Y J, WANG Ch L. Surface roughness measurement based on dichormatic digital speckle correlation[J]. Acta Optica Sinica, 2011, 31(4): 1-7(in Chinese).

[5] ZHANG J W, YUAN Z H, ZHANG Y H. Analysis on large radius of curved surface Roughness trichoromatic laser autocorrelation measurement[J].Laser & Optoelectronics Progress, 2011,48(1): 41-45(in Chinese).

[6] TOH S L, QUAN C, WOO K C, et al. Whole field surface roughness measurement by laser speckle correlation technique[J]. Optics & Laser Technology, 2001, 33(6): 427-434(in Chinese).

[7] WANG J, LIU H B. Numercial simulation of surface-roughness measurement based on angular-speckle correlation method using spatial average[J]. Acta Optica Sinica, 2007, 27(2): 260-264(in Chinese).

[8] ULF P. Surface roughness measurement on machined surfaces using angular speckle correlation[J]. Journal of Materials Processing Technology,2006, 180(1/3): 233-238.

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[10] LIU H B, LIU Ch L. Experimental research on surface roughness measurement using angular-speckle correlation[J].Acta Optica Sinica, 2009, 29(3): 697-701(in Chinese).

[11] LIU M. Study on the distribution properties of image plane speckle fields produced by Gaussian correlation weak scattering screens[J]. Acta Physica Sinica, 2013, 62(9): 094204(in Chinese).

[12] LIANG Zh J, WANG K F, GU G Q, et al. Digital speckle image correlation method base on particle swarm optimization algorithm[J]. Laser Technology, 2014, 38(5): 603-607(in Chinese).

陈晨, 郭晓明, 马军, 王文生. 基于激光散斑角度相关法表面粗糙度测量[J]. 激光技术, 2015, 39(4): 497. CHEN Chen, GUO Xiaoming, MA Jun, WANG Wensheng. Measurement of surface roughness based on laser angular-speckle correlation method[J]. Laser Technology, 2015, 39(4): 497.

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