中国激光, 2011, 38 (4): 0402006, 网络出版: 2011-03-24   

利用衍射理论对基模高斯光束进行整形

Beam Shaping of TEM00 Gaussian Beam by Using Diffraction Theory
王小发 1,2,3,*康治军 3樊仲维 1,3连富强 1,2,3黄科 1,2,3余锦 1
作者单位
1 中国科学院光电研究院, 北京 100080
2 中国科学院研究生院, 北京 100049
3 北京国科世纪激光技术有限公司, 北京 100085
摘要
为了获得在液晶修复技术中所需要的光束质量好、能量分布比较均匀的矩形光束,提出了一种新的光束整形系统。在这个系统中,通过对光阑后不同位置衍射效应的理论分析和计算,获得相应的衍射光斑图样,再利用4f像传递系统对理想的光斑图样进行提取和传递,经过扩束聚焦之后,用于加工样品,并设计了相应的实验装置来验证这种系统的可行性。研究结果表明,过光阑后不同位置的衍射面呈现出复杂的衍射图样,等效距离在56.0~58.5 mm之间能够选取到平化效果非常好的衍射面,4f成像系统对其实现了较好的像传递,整形光束顶部的能量波动量小于5%,能量提取率达到80%。
Abstract
In order to obtain the rectangular beam required for liquid crystal display(LCD) repair technology with good beam quality and uniform energy distribution, a new beam shaping system has been proposed. In this system, related diffraction patterns can be obtained by calculating and analyzing the diffraction effects in theory at different positions through rectangular aperture, and a proper diffraction surface, which will be used to process the sample, can be extracted and transferred by using 4f image relaying system. In addition, a relevant experimental device has been designed to prove the feasibility of this system. The results show that there exit some of the complex diffraction patterns after passing through the aperture, and some diffraction planes with very good energy uniformity distribution can be selected in the 56.0~58.5 mm range of the equivalent distance. The effective delivery is achieved by the use of 4f imaging system, the fluctuation range of energy on the top of shaped beam is less than 5%, and energy efficiency is about 80%.

王小发, 康治军, 樊仲维, 连富强, 黄科, 余锦. 利用衍射理论对基模高斯光束进行整形[J]. 中国激光, 2011, 38(4): 0402006. Wang Xiaofa, Kang Zhijun, Fan Zhongwei, Lian Fuqiang, Huang Ke, Yu Jin. Beam Shaping of TEM00 Gaussian Beam by Using Diffraction Theory[J]. Chinese Journal of Lasers, 2011, 38(4): 0402006.

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