[1] Muller J, Rech B, Springer J, Vanecek M. TCO and light trapping in silicon thin film solar cells. Solar Energy, 2004, 77(6): 917-930

[2] Zou D C, Wang D, Chu Z Z, Lv Z B, Fan X. Fiber-shaped flexible solar cells. Coordination Chemistry Reviews, 2010, 254(9-10): 1169-1178

[3] Dagkaldiran u, Gordijin A, Finger F, Yates H M, Evans P, Sheel D W, Remes Z, Vanecek M. Amorphous silicon solar cells made with SnO2:F TCO films deposited by atmospheric pressure CVD. Materials Science and Engineering B, 2009, 159-160: 6-9

[4] Manavizadeh N, Boroumand F A, Asl-Soleimani E, Raissi F, Bagherzadeh S, Khodayari A, Rasouli M A. Influence of substrates on the structural and morphological properties of RF suppered ITO thin films for photovoltaic application. Thin Solid Films, 2009, 517(7): 2324-2327

[5] Wang X J, Zeng X B, Huang D Q, Zhang X, Li Q. The properties of Al doped ZnO thin films deposited on various substrate materials by RF magnetron sputtering. Materials in Electronics, 2012, 23(8): 1580-1586

[6] Stowell M, Muller J, Ruske M, Lutz M, Linz T. RF-superimposed DC and pulsed DC sputtering for deposition of transparent conductive oxides. Thin Solid Films, 2007, 515(19): 7654-7657

[7] Pan M, Fenwick W E, Strassburg M, Li N, Kang H, Kane M H, Asghar A, Gupta S, Varatharajan R, Nause J, El-Zein N, Fabiano P, Steiner T, Ferguson I. Metal-organic chemical vapor deposition of ZnO. Journal of Crystal Growth, 2006, 287(2): 688-693

[8] Wang S P, Shan C X, Yao B, Li B H, Zhang J Y, Zhao D X, Shen D Z, Fan X W. Electrical and optical properties of ZnO films grown by molecular beam epitaxy. Applied Surface Science, 2009, 255(9): 4913-4915

[9] Al Asmar R, Ferblantier G, Sauvajol J L, Giani A, Khoury A, Foucaran A. Fabrication and characterization of high quality ZnO thin films by reactive electron beam evaporation technique. Microelectronics Journal, 2005, 36(8): 694-699

[10] Bacaksiz E, Aksu S, Yilmaz S, Parlak M, Altunbas M. Structural, optical and electrical properties of Al-doped ZnO microrods prepared by spray pyrolysis. Thin Solid Films, 2010, 518(15): 4076-4080

[11] Bruncko J, Vincze A, Netrvalova M. Study of ZnO layers growth by pulsed laser deposition from Zn and ZnO targets. Vacuum, 2009, 84(1): 162-165

[12] Kim Y S, Tai W P. Electrical and optical properties of Al-doped ZnO thin films by sol-gel process. Applied Surface Science, 2007, 253(11): 4911-4916

[13] Wu Y B. Deposition of ZnO and Al Depoed ZnO Films by Magnetron Sputtering and Fabrication of MSM Ultraviolet Photodetector. Dissertation for the Doctoral Degree. Xiamen: Xiamen University, 2009