采用空间频谱方法分析了衍射光学束匀滑器件的焦面光强分布,重新定义了光能利用率及顶部不均匀性两个参数,由于其定义的溯源性,能够真实准确地评价束匀滑器件的设计性能.最后,采用这两个参数对精细化设计前后的衍射光学束匀滑器件性能进行了对比,结果证明了精细化设计的有效性.

In this paper, the performance of the diffractive optical element (DOE) for beam smoothing is analyzed by using the spatial frequency spectrum. Two parameters, light efficiency and top non uniformity, are re defined based on the spatial frequency spectrum. These two parameters can truly and exactly evaluate the performance of the DOE for beam smoothing, because their definitions go back to the origin. Finally, these two performance parameters are calculated, whether the precise design of the DOE for beam smoothing is adopted or not. The calculated results show the validity of the precision design of the DOE.