利用阵列反射镜面的三维调整(绕y/x轴旋转和沿z轴平动)可实现多路光束间的相位差校正和焦斑定位。基于此建立了2×2光束相干合成控制模型，并采用光学追迹和衍射计算求解模型，计算得到旋转±0.5 μrad，平动±105.3 nm的调整精度。在精度范围内进行蒙特卡罗误差分析，比较了平面波和非平面波入射条件下的系统性能，并对对称结构光束布局进行了统计分析。结果表明，对称结构可有效提高远场焦斑直径20 μm环围功率比的统计平均水平。对大型高功率固体激光装置实现相干合成提高输出功率水平具有重要意义。

A coherent beam combining model with 2×2 segment mirrors is developed with a 3D adjustment including 2D rotation and 1D translations to realize phase lock between individual beams for the higher output power. The combining model is simulated using ray tracing and diffraction method, and the accuracy of adjusting parameters with rotations of ±0.5 μrad and translation of ±105.3 nm are obtained. Considering the adjusting tolerance, the system performance is estimated by Monte-Carlo error analysis for flat wavefront and non-flat wavefront. The power ratio within 20 μm diameter spot in symmetrical layout is statistically analyzed compared with that in asymmetrical layout. The results show that the symmetrical layout is effectively beneficial to raise output power level of large-scale high-power solid-state laser by coherent combining.