用矩阵条件数求解相移最佳采样方式
惠梅, 王东生, 邓年茂, 李庆祥, 徐毓娴. 用矩阵条件数求解相移最佳采样方式[J]. 光子学报, 2003, 32(4): 477.
惠梅, 王东生, 邓年茂, 李庆祥, 徐毓娴. The Solution of Best Sampling Manner in Phase-shifting Interferometry Based on Matrix Condition Number[J]. ACTA PHOTONICA SINICA, 2003, 32(4): 477.
[1] Wyant J C.Interferometric optical metrology: basic principles and new systems.Laser Focus, 1982, 14 (5): 65~71
[2] 聂铁军,侯谊,郑介庸.数值计算方法.西安:西北工业大学出版社,1990.76~79Nie T J,Hou Y,Zhen J Y.Numerical value calculation methods.Xi′an:Northwest Industry University Publishing Company,1990.76~79
[3] 上海交通大学.线性代数.北京:高等教育出版社,1982.131~132Shanghai Jiao Tong University.Linearity Algebra.Beijing:Higher education publishing company,1982.131~132
[4] 齐治昌.数值分析及其应用.长沙:国防科技大学出版社,1996.248~252Qi Z C.Numerical value analysis and application.Changsha:National Defense Science and Technology University Publisheng Company,1996.248~252
[6] 惠梅.表面微观形貌测量中相移干涉术的算法与实验研究[博士学位论文].西安:中国科学院西安光学精密机械研究所,2001Hui M.The algorithm and experiment study of phase-stepping interferometry in surface micro topography measurement.Doctor degree dissertation of Chinese Academy of Science,2001
惠梅, 王东生, 邓年茂, 李庆祥, 徐毓娴. 用矩阵条件数求解相移最佳采样方式[J]. 光子学报, 2003, 32(4): 477. 惠梅, 王东生, 邓年茂, 李庆祥, 徐毓娴. The Solution of Best Sampling Manner in Phase-shifting Interferometry Based on Matrix Condition Number[J]. ACTA PHOTONICA SINICA, 2003, 32(4): 477.