光子学报, 2003, 32 (12): 1506, 网络出版: 2007-09-17   

脉冲激光沉积GaN薄膜的结构和光学特性研究

Optical and Structural Properties of GaN Films Grown on Si Substrate by Excimer Pulsed Laser Deposition
作者单位
1 激光技术国家重点实验室,华中科技大学,武汉,430074
2 上海交通大学,分析测试中心,上海,200030
引用该论文

童杏林, 郑启光, 于本海, 秦应雄, 席再军, 路庆华. 脉冲激光沉积GaN薄膜的结构和光学特性研究[J]. 光子学报, 2003, 32(12): 1506.

童杏林, 郑启光, 于本海, 秦应雄, 席再军, 路庆华. Optical and Structural Properties of GaN Films Grown on Si Substrate by Excimer Pulsed Laser Deposition[J]. ACTA PHOTONICA SINICA, 2003, 32(12): 1506.

参考文献

[1] Shi J Y,Yu L P,Wang Y Z,et al.In fluence of different types of threading dislocations on the carrier mobility and photoluminescence in epitaxial GaN.Appl Phys Lett,2002,80(13): 2293~2295

[2] Moore W J,Freitas J A, Jr,et al.Magneto-optical studies of free-standing hydride-Vapor-phase epitaxial GaN.Phys Rev(B), 2002,65(8):0810201(R)

[3] 任韧,陈长乐,金克新,等.用于薄膜沉积的XeCl激基激光器研制.光子学报,2002,31(9):1097~1100 Ren R, Chen C L, Jin K X,et al.Acta Photonica Sinca,2002,31(9):1097~1100

[4] Wang R P,Muto H,Yamada Y,et al.Effect of ZnO buffer layer on the quality of GaN films deposited by pulsed laser ablation.Thin Solid Films, 2002,411(1):69~75

[5] Willmott P R,Antonj F. Growth of GaN(0001) thin films on Si(001) by pulsed reactive crossed-beam laser ablation using liquid Ga and N2.Appl Phys Lett, 1998,73(10):1394~1396

[6] Rosner S J,Carr E C,Ludowise M J,et al.Correlation of cathodoluminescence inhomogeneity with microstructural defects in epitaxial GaN grown by metalorganic chemical-vapor deposition.Appl Phys Lett, 1997,70(4):420~422

[7] Neugebauer J rg,Van de Walle Chris G.Gallium vacancies and the yellow luminescence in GaN.Appl Phys Lett, 1996,69(4):503~505

[8] 吴学华,Speck J S, 吴自勤.高质量GaN外延薄的生长.物理,1997,27(1):44~51 Wu X H,Speck J S, Wu Z Q.Physics, 1997,27(1):44~51

[9] Zubrilov A S,Nikishin S A,Kipshidze G D,et al.Optical properties of GaN grown on Si(111) by gas source molecular beam epitaxy with ammonia.J Appl Phys,2002,91(3):1209~1212

[10] Huang H Y,Chuang C H,Shu C C,et al.Photoluminescence and photoluminescence excitation studies of as gtown and P-implanted GaN: on the nature of yellow luminescence.Appl Phys Lett, 2002,80(18): 3349

[11] 赖天树,林位株,莫党.非掺杂GaN的黄光发射模型确定.物理学报,2002,51(5):1149~1152 Lai T S, Lin W Z, Mo D.Acta Physica Sinca,2002,51(5):1149~1152

童杏林, 郑启光, 于本海, 秦应雄, 席再军, 路庆华. 脉冲激光沉积GaN薄膜的结构和光学特性研究[J]. 光子学报, 2003, 32(12): 1506. 童杏林, 郑启光, 于本海, 秦应雄, 席再军, 路庆华. Optical and Structural Properties of GaN Films Grown on Si Substrate by Excimer Pulsed Laser Deposition[J]. ACTA PHOTONICA SINICA, 2003, 32(12): 1506.

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