根据傅里叶变换原理,提出了一种对由三个压电陶瓷堆(PZT)组成的干涉仪移相器进行非线性及平行性校正与标定的方法。在对各个压电陶瓷堆进行非线性校正的基础上,利用干涉图像自动分析系统,综合分析各个压电陶瓷堆之间的牵制作用,从而得到对整体干涉仪移相器平行性校正的补偿依据。组建了一套卧式数字平面干涉仪,在干涉仪移相器承重6kg的情况下进行实验,非线性误差由12%校正至0.3%。由于干涉仪相移器承重而引起的移相过程中的条纹旋转降至2°,条纹间距变化小于2%。

A self-calibrating method was proposed to calibrate the nonlinear of phase shifting adapter (PSA) consisting of three piezoelectric ceramics. Fast Fourier transform and linear polynomial fitting algorithms were used to rectify the nonlinearity of PSA, and fringe processing method was used to decline the rotation to 1° and the change of fringe distance to 2%. Experiments give testing results and show the priority of the calibrating method.