单层柱状结构薄膜体散射的理论研究
吴晗, 张锦龙, 李刚正, 孙英会. 单层柱状结构薄膜体散射的理论研究[J]. 光学学报, 2016, 36(3): 0331001.
Wu Han, Zhang Jinlong, Li Gangzheng, Sun Yinghui. Theoretical Research on Volume Scattering of Thin Films with Single-Layer Columnar Structure[J]. Acta Optica Sinica, 2016, 36(3): 0331001.
[1] Duparré A, Kassam S. Relation between light scattering and the microstructure of optical thin films[J]. Applied Optics, 1993, 32(28): 5475-5480.
[2] 唐晋发, 顾培夫, 刘旭, 等. 现代光学薄膜技术[M]. 杭州: 浙江大学出版社, 2006: 385-388.
Tang Jinfa, Gu Peifu, Liu Xu, et al.. Modern Optical Thin Film Technology[M]. Hangzhou: Zhejiang University Press, 2006: 385-388.
[3] Amra C, Grezes-Besset C, Maure S, et al.. Light scattering from localized and random interface or bulk irregularities in multilayer optics: the inverse problem[C]. SPIE, 1994, 2253: 1184-1200.
[4] Elson J M. Theory and Software for Light Scattering from Multilayer Optical Components with Interfacial Roughness[R]. Naval Air Warfare Center, Weapons Division, China Lake, CA, Technical Publication 8084, 1992.
[5] Elson J M. Theory of light scattering from a rough surface with an inhomogeneous dielectric permittivity[J]. Physical Review B, 1984, 30(10): 5460-5480.
[6] Kassam S, Duparré A, Hehl K, et al.. Light scattering from the volume of optical thin films: theory and experiment[J]. Applied Optics, 1992, 31(9): 1304-1313.
[7] Maure S, Albrand G, Amra C. Low-level scattering and localized defects[J]. Applied Optics, 1996, 35(28): 5573-5582.
[8] Arnaud L, Georges G, Deumié C, et al.. Discrimination of surface and bulk scattering of arbitrary level based on angle-resolved ellipsometry: theoretical analysis[J]. Optics Communications, 2008, 281(6): 1739-1744.
[9] 杨利红, 王涛, 苏俊红, 等. 激光预处理对HfO2薄膜损伤特性的影响[J]. 光学学报, 2013, 33(12): 1231001.
[10] Thielsch R, Gatto A, Heber J, et al.. A comparative study of the UV optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion-assisted deposition and plasma ion-assisted deposition[J]. Thin Solid Films, 2002, 410(1-2): 86- 93.
[11] 何俊鹏, 章岳光, 沈伟东, 等. 原子层沉积制备Al2O3薄膜的光学性能研究[J]. 光学学报, 2010, 30(1): 277-282.
[12] Amra C, Grèzes-Besset C, Bruel L. Comparison of surface and bulk scattering in optical multilayers[J]. Applied Optics, 1993, 32(28): 5492-5503.
吴晗, 张锦龙, 李刚正, 孙英会. 单层柱状结构薄膜体散射的理论研究[J]. 光学学报, 2016, 36(3): 0331001. Wu Han, Zhang Jinlong, Li Gangzheng, Sun Yinghui. Theoretical Research on Volume Scattering of Thin Films with Single-Layer Columnar Structure[J]. Acta Optica Sinica, 2016, 36(3): 0331001.
PDF全文
