双柔性平行六连杆微动平台结构的设计及测试
赵荣丽, 陈新, 李克天. 双柔性平行六连杆微动平台结构的设计及测试[J]. 光学 精密工程, 2015, 23(10): 2860.
ZHAO Rong-li, CHEN Xin, LI Ke-tian. Design and experiments of micro motion platform based on a pair of flexible parallel six-bar linkages[J]. Optics and Precision Engineering, 2015, 23(10): 2860.
[1] KYUNG S M, WOO C C, SHIN H S. Static and dynamic analysis of a nano-positioning flexure-hinge stage with a flexible lever mechanism [J]. Engineering Manufacture, 2005, B08504: 447-454.
[2] 马力,荣伟斌,孙立宁. 三维纳米级微动台的设计与分析[J]. 光学 精密工程,2006,14(6): 1017-1024.
[3] POLIT S, DONG J Y. Development of a high-band-width XY nano-positioning stage for high-rate micro-nano manufacturing [J]. IEEE/ASME Transactions on Mechatronics, 2011, 16(4): 724-733.
[4] LI Y M, XU Q S. A totally decoupled piezo-driven XYZ flexure parallel micro-positioning stage for micro/nano manipulation[J]. IEEE/ASME Transactions on Science and Engineering, 2011, 8(2): 265-279.
[5] CHENG L,ZHANG C J,ZHANG G J. High-speed and large-range scanning control of a piezoelectric stack actuated platform[C]. Proceedings of the 8th World Congress on Intelligent Control and Automation. Jinan: Shandong University Press, 2010: 5523-5527.(in Chinese)
[6] 张彦斐,宫金良.2自由度大行程微定位平台结构与参数设计[J].机械工程学报,2010,46(23): 30-35.
ZHANG Y , GONG J L. Structure and parameter design for two degrees of freedom micro-positioning mechanism with lager travel[J].Journal of Mechanical Engineering, 2010,46(23): 30-35.(in Chinese)
[7] 朱玉龙. 基于双压电驱动宏微结合的纳米定位台研究[D]. 苏州: 苏州大学,2013.
ZHU Y L. Researching on Coarse-fine Nano- positioning Stage based on Dual Piezoelectric Drive[D]. Suzhou: Suzhou University, 2013.(in Chinese)
[8] 马力,谢炜,刘波,等.柔性铰链微定位平台的设计[J]. 光学 精密工程,2014,22(2): 338-345.
[9] 林超,俞松松,等. 微/纳米定位平台的动态特性分析与试验[J]. 浙江工业大学学报(工学版),2012,46(8): 1375-1381.
LIN CH, YU S S, et al.. Dynamic analysis and testing of micro/nano-positioning platform[J]. Journal of Zhejiang University(Engineering Science), 2012, 46(8): 1375-1381.(in Chinese)
[10] 俞松松. 多尺度微/纳米定位系统的设计/分析及试验研究[D]. 重庆: 重庆大学,2011.
YU S S. Design, Analysis and Testing of a Multi-scale Micro/nano-positioning System[D]. Chongqing: Chongqing University, 2011.(in Chinese)
[11] 裴旭,李远玥,侯振兴.大行程转动柔性铰链性能测试及实验[J].光学 精密工程,2013,21(4): 928-933.
PEI X, LI Y Y, HOU ZH X. Performance measurement and experiment for rotational flexural joint with large-stroke [J]. Opt. Precision Eng., 2013, 21(4): 928-933.(in Chinese)
[12] 周京博,孙涛,侯国安. 双柔性支撑板快速伺服刀架优化设计与测试[J]. 光学 精密工程,2013,21(2): 349-355.
[13] 吴鹰飞,周兆英.柔性铰链的设计计算[J].工程力学,2002,19(6): 136-140.
WU Y F, ZHOU ZH Y. Design of flexure hinges[J]. Engineering Mechanics, 2002, 19(6): 136-140.(in Chinese)
[14] 吴鹰飞,周兆英. 柔性铰链转动刚度计算公式的推导[J]. 仪器仪表学报,2004, 25(1): 125-128,137.
WU Y F, ZHOU ZH Y. Deduction of design equation of flexure hinge [J]. Chinese Journal of Scientific Instrument,2004, 25(1): 125-128,137.(in Chinese)
[15] HER I. Methodology for compliant mechanism Design [D]. Purdue University, 1986.
[16] GUI M CH, JIAN Y J,ZHI W L. Right-circular Corner-filleted Flexure Hinges[C]. Proceedings of the 2005 IEEE International conference on Automation Science and Engineering Edmonton, Canada, August 1 & 2, 2005: 249-253.
[17] PAROS J M, WEISBORO L. How to design flexure hinges[J].Machine Design, 1965, 37(27): 151-157.
[18] 朱梦非,梁平. 基于LabVIEW的激光多普勒测速系统研究[J]. 国外电子测量技术, 2011,30(5): 48-54.
ZHU M F, LIANG P. Research on laser doppler vibrometer based on LabVIEW [J]. Foreign Electronic Measurement Technology, 2011, 30(5): 48-54. (in Chinese)
赵荣丽, 陈新, 李克天. 双柔性平行六连杆微动平台结构的设计及测试[J]. 光学 精密工程, 2015, 23(10): 2860. ZHAO Rong-li, CHEN Xin, LI Ke-tian. Design and experiments of micro motion platform based on a pair of flexible parallel six-bar linkages[J]. Optics and Precision Engineering, 2015, 23(10): 2860.