基于彩色共焦的位移测量系统研究
高鑫, 邓文怡, 牛春晖. 基于彩色共焦的位移测量系统研究[J]. 光学技术, 2012, 38(1): 83.
GAO Xin, DENG Wenying, NIU Chunhui. Research of displacement measurement system based on chromatic confocal[J]. Optical Technique, 2012, 38(1): 83.
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高鑫, 邓文怡, 牛春晖. 基于彩色共焦的位移测量系统研究[J]. 光学技术, 2012, 38(1): 83. GAO Xin, DENG Wenying, NIU Chunhui. Research of displacement measurement system based on chromatic confocal[J]. Optical Technique, 2012, 38(1): 83.
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