[1] Hornbeck L J. 128×128 deformable mirror device[J]. IEEE Transactions on Electron Devices, 1983, 30(5): 539-545.

[2] Hou L, Smith N R, Heikenfeld J. Electrowetting manipulation of any optical film[J]. Applied Physics Letters, 2007, 90(25): 251114.

[3] 吕挺, 段玉雄, 项静峰, 等. 780 nm声光调制器的温度特性[J]. 光学学报, 2017, 37(8): 0812001.

    Lü T, Duan Y X, Xiang J F, et al. Temperature characteristics of 780 nm acousto-optic modulator[J]. Acta Optica Sinica, 2017, 37(8): 0812001.

[4] 张秀萍, 张林波, 刘军, 等. 空间窄线宽激光器光学系统研究[J]. 光学学报, 2018, 38(4): 0414003.

    Zhang X P, Zhang L B, Liu J, et al. Optical system of spatial narrow linewidth laser[J]. Acta Optica Sinica, 2018, 38(4): 0414003.

[5] Lin Y J, Chen K M, Wu S T. Broadband and polarization-independent beam steering using dielectrophoresis-tilted prism[J]. Optics Express, 2009, 17(10): 8651-8656.

[6] Cheng J T, Chen C L. Adaptive beam tracking and steering via electrowetting-controlled liquid prism[J]. Applied Physics Letters, 2011, 99(19): 191108.

[7] Smith N R, Abeysinghe D C, Haus J W, et al. Agile wide-angle beam steering with electrowetting microprisms[J]. Optics Express, 2006, 14(14): 6557-6563.

[8] Liu C, Li L, Wang Q H. Liquid prism for beam tracking and steering[J]. Optical Engineering, 2012, 51(11): 114002.

[9] Xiong S, Liu A Q, Chin L K, et al. An optofluidic prism tuned by two laminar flows[J]. Lab on a Chip, 2011, 11(11): 1864-1869.

[10] Sun L. Polymeric waveguide prism-based electro-optic beam deflector[J]. Optical Engineering, 2001, 40(7): 1217-1222.

[11] Takei A, Iwase E, Hoshino K, et al. Angle-tunable liquid wedge prism driven by electrowetting[J]. Journal of Microelectromechanical Systems, 2007, 16(6): 1537-1542.

[12] Wang X, Wilson D, Muller R, et al. Liquid-crystal blazed-grating beam deflector[J]. Applied Optics, 2000, 39(35): 6545-6555.

[13] Resler D P, Hobbs D S, Sharp R C, et al. High-efficiency liquid-crystal optical phased-array beam steering[J]. Optics Letters, 1996, 21(9): 689-691.

[14] WinkerB, MahajanM, HunwardsenM. Liquid crystal beam directors for airborne free-space optical communications[C]∥2004 IEEE Aerospace Conference Proceedings (IEEE Cat. No.04TH8720), March 6-13, 2004, Big Sky, MT, USA. New York: IEEE, 2004: 1702- 1709.

[15] Apter B, Efron U, Bahat-Treidel E. On the fringing-field effect in liquid-crystal beam-steering devices[J]. Applied Optics, 2004, 43(1): 11-19.

[16] Löfving B, Hård S. Beam steering with two ferroelectric liquid-crystal spatial light modulators[J]. Optics Letters, 1998, 23(19): 1541-1543.

[17] KangH, KimJ. EWOD (electrowetting-on-dielectric) actuated optical micromirror[C]∥19th IEEE International Conference on Micro Electro Mechanical Systems, January 22-26, 2006, Istanbul, Turkey. New York: IEEE, 2006: 742- 745.

[18] Shahzad A, Song J K. Beam deflector and position sensor using electrowetting and mechanical wetting of sandwiched droplets[J]. Journal of Physics D: Applied Physics, 2016, 49(38): 385106.

[19] Lee J, Kim C J. Surface-tension-driven microactuation based on continuous electrowetting[J]. Journal of Microelectromechanical Systems, 2000, 9(2): 171-180.

[20] Li L, Liu C, Wang Q H. Optical switch based on tunable aperture[J]. Optics Letters, 2012, 37(16): 3306-3308.

[21] Liu C, Li L, Wang Q H. Bidirectional optical switch based on electrowetting[J]. Journal of Applied Physics, 2013, 113(19): 193106.

[22] Krupenkin T, Yang S, Mach P. Tunable liquid microlens[J]. Applied Physics Letters, 2003, 82(3): 316-318.

[23] Müller P, Kloss A, Liebetraut P, et al. A fully integrated optofluidic attenuator[J]. Journal of Micromechanics and Microengineering, 2011, 21(12): 125027.