光学学报, 1984, 4 (10): 939, 网络出版: 2011-09-15
分析光学薄膜的椭偏方程的计算方法
Computation method for analysing ellipsometric equation of optical thin films
摘要
叙述了用测量到的椭偏角ψ及Δ来确定光学薄膜的折射率、厚度和消光系数的方法.该方法收敛较快并节省时间.
Abstract
A method for determining the refractive index, thickness and extinction coefficient of optical films from measured ellipsometric ψ and Δ is described. This method is founded more convergent and time-saving parameters.
范正修, 杨本祺. 分析光学薄膜的椭偏方程的计算方法[J]. 光学学报, 1984, 4(10): 939. FAN ZHENGXIU, YANG BENQI. Computation method for analysing ellipsometric equation of optical thin films[J]. Acta Optica Sinica, 1984, 4(10): 939.
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