光学学报, 2010, 30 (1): 206, 网络出版: 2010-02-01   

亚微米线条的微纳光纤笔直写技术研究

Direct Writing of Submicron Lines Using the Micro-and Nanofiber Pens
作者单位
浙江大学 现代光学仪器国家重点实验室,浙江 杭州 310027
引用该论文

田丰, 杨国光, 白剑, 徐建锋, 梁宜勇. 亚微米线条的微纳光纤笔直写技术研究[J]. 光学学报, 2010, 30(1): 206.

Tian Feng, Yang Guoguang, Bai Jian, Xu Jianfeng, Liang Yiyong. Direct Writing of Submicron Lines Using the Micro-and Nanofiber Pens[J]. Acta Optica Sinica, 2010, 30(1): 206.

参考文献

[1] . Tamada,T. Doumuki,T. Yamaguchi et al.. Al wire-grid polarizer using the s-polarization resonance effect at the 0.8-μm-wavelength band[J]. Opt. Lett., 1997, 22(6): 419-421.

[2] 张亮,李承芳,刘文 等. 一种亚波长偏振分波/合波器的研制[J]. 光学学报,2006,26(7):1048-1052

    Zhang Liang,Li Chengfang,Liu Wen et al.. Development of broadband polarizing beam splitter/combiner[J]. Acta Optica Sinica,2006,26(7):1048-1052

[3] . Direct optical fabrication of three-dimensional photonic crystals in a high refractive index LiNbO3 crystal[J]. Opt. Lett., 2006, 31(18): 2783-2785.

[4] . A. Slattery,D. N. Nikogosyan,G. Brambilla. Fiber Bragg grating inscription by high-intensity femtosecond UV laser light:comparison with other existing methods of fabrication[J]. J. Opt. Soc. Am. B-Opt. Phys., 2005, 22(2): 354-361.

[5] . C. Tapalian,J. Langseth,Y. Chen et al.. Ultrafast laser direct-write actuable microstructures[J]. Appl. Phys. Lett., 2008, 93: 243304.

[6] . J. Ehrlich,R. M. Osgood,T. F. Deutsch. Laser chemical technique for rapid direct writing of surface relief in silicon[J]. Appl. Phys. Lett., 1981, 38(12): 1018-1020.

[7] . P. McDonald,V. R. Mistry,K. E. Ray et al.. Femtosecond pulsed laser direct write production of nano-and microfluidic channels[J]. Appl. Phys. Lett., 2006, 88: 183113.

[8] . B. Sun,S. Kawata. Two-photon laser precision microfabrication and its applications to micro-nano devices and systems[J]. J. Lightwave Technology, 2003, 21(3): 624-633.

[9] 陈林森,解剑锋,沈雁 等. 双、单光束互换光学头方光斑激光直写系统设计[J]. 中国激光,2005,32(4):487-491

    Chen Linsen,Xie Jianfeng,Shen Yan et al.. Design of laser direct writing system with changeable double or single beam optical head[J]. Chinese J. Lasers,2005,32(4):487-491

[10] . Matsui,K. Mori. Direct writing onto Si by electron-beam stimulated etching[J]. Appl. Phys. Lett., 1987, 51(19): 1498-1499.

[11] . E. Ocola,V. R. Tirumala. Nanofabrication of super-high-aspect-ratio structures in hydrogen silsesquioxane from direct-write e-beam lithography and hot development[J]. J. Vacuum Science and Technology B, 2008, 26(6): 2632-2635.

[12] . S. Sun,A. Chen,B. C. Olbricht et al.. Polarization selective electro-optic polymer waveguide devices by direct electron beam writing[J]. Opt. Express, 2008, 16(12): 8472-8479.

[13] 李以贵,陈迪,朱军 等. 基于一种新微细加工技术的亚波长光栅的研制[J]. 光学学报,2002,22(8):1008-1010

    Li Yigui,Chen Di,Zhu Jun et al.. Sub-wavelength gratings based on a new microfabrication technology[J]. Acta Optica Sinica,2002,22(8):1008-1010

[14] . Matsumoto,Y. Anzai,T. Shintani et al.. Writing 40 nm marks by using a beaked metallic plate near-field optical probe[J]. Opt. Lett., 2006, 31(2): 259-261.

[15] . I. Smolyaninov,D. L. Mazzoni,C. C. Davis. Near-field direct-write ultraviolet lithography and shear force microscopic studies of the lithographic process[J]. Appl. Phys. Lett., 1995, 67(26): 3859-3861.

[16] . Bures,R. Ghosh. Power density of the evanescent field in the vicinity of a tapered fiber[J]. J. Opt. Soc. Am. A-Optics Image Science and Vision, 1999, 16: 1992-1996.

[17] L. M. Tong,R. R. Gattass,J. B. Ashcom et al.. Subwavelength-diameter silica wires for low-loss optical wave guiding[J]. Nature,2006,426( ):816-819

[18] . M. Tong,J. Y. Lou,E. Mazur. Single-mode guiding properties of subwavelength-diameter silica and silicon wire waveguides[J]. Opt. Express, 2004, 12: 1025-1035.

[19] . . Modeling endface output patterns of optical micro/nanofibers[J]. Opt. Express, 2008, 16(12): 8887-8895.

田丰, 杨国光, 白剑, 徐建锋, 梁宜勇. 亚微米线条的微纳光纤笔直写技术研究[J]. 光学学报, 2010, 30(1): 206. Tian Feng, Yang Guoguang, Bai Jian, Xu Jianfeng, Liang Yiyong. Direct Writing of Submicron Lines Using the Micro-and Nanofiber Pens[J]. Acta Optica Sinica, 2010, 30(1): 206.

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