中国激光, 2014, 41 (7): 0707001, 网络出版: 2014-06-24   

不同基底上SiO2薄膜红外波段的水吸收特性

Substrate Effects on the Water Absorption of Infrared SiO2 Film
作者单位
1 中国科学院上海精密机械研究所, 上海 201800
2 中国科学院大学, 北京 100049
引用该论文

李豪, 易葵, 崔云, 范正修. 不同基底上SiO2薄膜红外波段的水吸收特性[J]. 中国激光, 2014, 41(7): 0707001.

Li Hao, Yi Kui, Cui Yun, Fan Zhengxiu. Substrate Effects on the Water Absorption of Infrared SiO2 Film[J]. Chinese Journal of Lasers, 2014, 41(7): 0707001.

参考文献

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[6] Huang J, Zeng Y, Wang W, et al.. Reduction of residual stress in SiO2-matrix silicon nano-crystal thin films by a combination of rapid thermal annealing and tube-furnace annealing[J]. Physic Status Solid Applications and Materials Science, 2013, 210(3): 528-532.

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    Wang He, He Hongbo, Zhang Weili. Substrate effects on the microstructure and mechanical properties of SiO2 thin films[J]. J Inorganic Materials, 2013, 28(6): 653-658.

[13] Richard T, Mercury L, Poulet F, et al.. Diffuse reflectance infrared Fourier transform spectroscopy as a tool to characterise water in adsorption/confinement situations[J]. Journal of Colloid and Interface Science, 2006, 304(1): 125-136.

李豪, 易葵, 崔云, 范正修. 不同基底上SiO2薄膜红外波段的水吸收特性[J]. 中国激光, 2014, 41(7): 0707001. Li Hao, Yi Kui, Cui Yun, Fan Zhengxiu. Substrate Effects on the Water Absorption of Infrared SiO2 Film[J]. Chinese Journal of Lasers, 2014, 41(7): 0707001.

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