光学学报, 2001, 21 (6): 744, 网络出版: 2006-08-10
微悬臂梁探测器的理论模型及优化设计
Model and Optimization of a Novel Detector for Light Radiation
摘要
对基于微悬臂梁的光学和红外探测技术进行了理论分析,并建立了相应的理论模型,在此基础上对该类探测器进行了优化设计,包括:微悬臂梁材料的优化选择、金属镀膜材料及厚度的优化选择以及光辐射吸收层材料的选择。最终给出了一种新型的三层结构微悬臂梁探测器,理论上这种新型结构的探测器比现报道的同类探测器灵敏度高出20多倍,噪声等效功率降低了85%~70%。
Abstract
The theoretical model of the microcantilever used in the light radiation is given based on the theoretical analysis. A novel detector is designed after the optimization about the material of the microcantilever, the coating and the radiation absorbing layer. Compared with the traditional ones, the sensitivity of this new model is made more than twenty times improvement and the noise-equivalent power is decreased 85%~70%.
刘月明, 刘月明, 刘君华, 张少君. 微悬臂梁探测器的理论模型及优化设计[J]. 光学学报, 2001, 21(6): 744. 刘月明, 刘月明, 刘君华, 张少君. Model and Optimization of a Novel Detector for Light Radiation[J]. Acta Optica Sinica, 2001, 21(6): 744.