本文提出了一种自动设计思想,即在多层膜设计过程中考虑监控误差对多层膜光学特性的影响。在自动设计的评价函数中不仅包含了膜系的光学特性,而且还包含了计算机模拟的制备成品率,并以最高的生产成品率作为最终的优化目标。用这种方法设计出的膜系不仅满足光学特性要求,而且具有较大的制造允差,便于最经济地组织生产。以宽带减反射膜,可见光加1.06μm的双波段减反射膜为例进行了自动设计,设计结果是令人满意的。

A new automatic design method of optical thin film systems is presented, in which the effect of the errors in monitoring of optical multilauer coatings on the performance is considered. The merit function in the design involves not only the optical properties but also the rate of finished products of the multilayer coatings by computer simulation, and the highest rate of finished products is taken as the end optimization goal. The thin film systems designed by this method not only satisfy the rezuirement of optical properties but also have larger manufacture tolerance. Hence, this method will be very effective in production. Some examples of the designs of broad-band and double-band antireflection coatings are given. The resnlts of such designs are satisfactory.