中国激光, 2014, 41 (9): 0916002, 网络出版: 2014-08-12
光刻物镜光瞳极平衡性标定方法
Pupil Non-Balance Calibration for Lithographic Lens
摘要
极平衡作为光刻物镜的一项重要指标,受到多种误差因素综合调制,因此有必要准确区分各种误差源的独立贡献量。提出了一种标定方法,将远心度误差所引入的调制效果进行了解耦,对极平衡指标进行了标定,并与质心标定方法进行对比研究。实现途径是以Matlab程序作为载体,调用Code V进行远心度运算,对LightTools的光瞳强度仿真结果进行重新定位,从而获取远心分离后的极平衡性指标。此外,设计了一个光刻物镜方案作为研究对象,对标定程序进行了仿真验证。结果表明,该标定方法可有效分离远心误差对极平衡的调制作用,程序执行效率较高。
Abstract
As one of the critical target of lithographic lens, pupil non-balance is modulated by many factors. It is necessary to distinguish the respective contribution of those factors. In this paper, a method is introduced to calibrate pupil balance by removing telecentriciy, and a comparison is made with another approach based on finding centroid. A user defined program, which is written in Matlab with the function of manipulating Code V and LightTools data, is consequently made up to implement the above technique and calculate the real position of pupil intensity in angular plane without telecentircity. Beside, a series of simulation on an optimally designed lithographic lens under off-axis illumination is given to show the verification. It is revealed that this method is functional in calibrating pupil non-balance with a high level of implement efficiency.
芮大为, 史振广, 袁文全, 张巍. 光刻物镜光瞳极平衡性标定方法[J]. 中国激光, 2014, 41(9): 0916002. Rui Dawei, Shi Zhenguang, Yuan Wenquan, Zhang Wei. Pupil Non-Balance Calibration for Lithographic Lens[J]. Chinese Journal of Lasers, 2014, 41(9): 0916002.