通过测量软X射线相位型和振幅型聚焦波带片的一级衍射强度,实验得到了自行研制的两种相位型软X射线聚焦波带片的相对衍射特性。测量实验装置简单,调节相对容易。选择合适的针孔大小可使得接收信号有足够的信噪比。对波带片聚酰亚胺衬底的厚度进行了归一化。分别将3个镍和锗波带片的一级衍射强度与金波带片进行了比较。在3.2nm工作波长,研制的镍、锗软X射线相位型波带片的平均一级衍射效率分别是软X射线振幅型金波带片一级衍射效率的1.60和1.26倍,与理论值1.77和1.34很接近。测试结果表明,我们制作的相位型波带片具有较高精度。

The relative diffraction performance of soft Xray phase condenser zone plate and amplitude zone plate is obtained by measuring the first order diffraction intensity. The experimental setup is simple and relatively easy to adjust. The size of the pinhole is selected to obtain sufficient signalto-noise ratio. The thickness of the polyimide substrate is normalized. The first order diffraction intensity of three Ni and three Ge zone plates is compared with that of an Au zone plate. The experimental average first order efficiencies of the Ni and Ge zone plate are 1.60 and 1.26 times that of the Au amplitude zone plate at 3.2 nm, which are close to the theoretical results: 1.77 and 1.34. The measurement result indicates that the phase zone plates fabricated has high accuracy.