介绍基于GaAs变容二极管工艺的电调滤波器芯片的研究与设计，包括变容材料制备、二极管模型建立以及电路设计。设计数款电调滤波器，工作频段范围覆盖1~19 GHz。测试结果显示，电调滤波器具有 超过一个倍频程的调谐范围，器件击穿电压大于+30 V。本文选取中心频率为2~5 GHz可调的一款电调滤波器进行详细介绍，控制电压范围为0~15 V，插入损耗在10 dB左右，输入和输出驻波(电压驻波比)均优于1.8。 设计的系列化电调滤波器具有一致性高、小型化、低成本和免调试等优势，拥有良好的应用前景。

This paper introduces the research and design of the tunable filter based on the GaAs varactor technology, including the preparation of the variable capacitance material, the establishment of the diode model and the circuit design. Several tunable filters are designed, and the frequency range covers 1-19 GHz. The test results show that the tunable filter has more than one frequency doubling range, the breakdown voltage of the device is greater than 30 V. In this paper, a tunable filter with central frequency 2-5 GHz adjustable is introduced in detail. The control voltage range is 0-15 V, the insertion loss is about 10 dBm, and the input and output return VSWR(Voltage Standing Wave Ratio) are better than 1.8. The series of tunable filters designed bear the advantages of high consistency, miniaturization, low cost and debugging-free, and have good application prospects.