红外与激光工程, 2016, 45 (10): 1003003, 网络出版: 2016-11-14   

多晶金刚石固结磨料研磨垫精研石英玻璃的性能探索

Lapping performance on quartz glass of fixed abrasive pad embedded with multi-grain diamond grits
作者单位
南京航空航天大学 江苏省精密与微细制造技术重点实验室, 江苏 南京 210016
引用该论文

朱永伟, 沈琦, 王子琨, 凌顺志, 李军, 左敦稳. 多晶金刚石固结磨料研磨垫精研石英玻璃的性能探索[J]. 红外与激光工程, 2016, 45(10): 1003003.

Zhu Yongwei, Shen Qi, Wang Zikun, Ling Shunzhi, Li Jun, Zuo Dunwen. Lapping performance on quartz glass of fixed abrasive pad embedded with multi-grain diamond grits[J]. Infrared and Laser Engineering, 2016, 45(10): 1003003.

参考文献

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[8] Yang Minghong, Zhao Yuan′an, Yi Kui, et al. Subsurface damage characterization of ground fused silica by HF etching combined with polishing layer by layer[J]. Chinese Journal of Lasers, 2012, 39(3): 0303007. (in Chinese)

[9] Wang Wenze, Li Jun, Xia Lie, et al. Effect of abrasive sizes on lapping performance of fixed abrasive pad when machining quartz glass[J]. Diamond & Abrasives Engineering, 2015(2): 9-13. (in Chinese)

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[11] Gao P, Li J, Zhu Y W, et al. Study on subsurface damage after fixed-abrasive lapping with different particle size [J]. Solid State Phenomena, 2011, 175: 112-115.

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朱永伟, 沈琦, 王子琨, 凌顺志, 李军, 左敦稳. 多晶金刚石固结磨料研磨垫精研石英玻璃的性能探索[J]. 红外与激光工程, 2016, 45(10): 1003003. Zhu Yongwei, Shen Qi, Wang Zikun, Ling Shunzhi, Li Jun, Zuo Dunwen. Lapping performance on quartz glass of fixed abrasive pad embedded with multi-grain diamond grits[J]. Infrared and Laser Engineering, 2016, 45(10): 1003003.

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