介绍了采用光刻离子交换工艺制作平面交叉型微透镜阵列的方法。利用积分形式的光线方程式讨论了平面交叉型微透镜的近轴光学特性,研究了微透镜的光线轨迹方程式和一些重要的近轴成像特性,利用ABCD定理得到了平面交叉型微透镜像距、焦距、像高、横向放大率和主平面位置的数学表达式,焦距的理论计算结果和实验数据吻合得很好。

In the paper, ion-exchange technique fabrication method of planar intersect microlens arrays is given. Using ray equations in integral form, paraxial optical properties of microlens arrays are studies. The ray trajectory equation and imaging of microlens arrays are presented. Mathematics expressions of images distance, focal length, image height lateral magnification and plane by ABCD law are obtain. Theoretical calculated results of focusing length are in good agreement with the experimental date.