用反应式射频磁控溅射方法制备了纯氧化锌(ZnO)薄膜和掺Ag的ZnO气敏光学传感薄膜。测量了这些薄膜在NOx气体中的透射光谱,然后由透射光谱获得了灵敏度的变化规律,发现掺Ag后的ZnO薄膜对NOx气体的灵敏度高于纯ZnO薄膜,用俄歇电子能谱(AES)测试了这些薄膜的组分,发现当掺Ag量为5%时灵敏度最高。并结合朗缪尔(Langmuir)型吸附平衡关系式解释了这些现象,理论和实验结果能很好地相符。

Ag doped ZnO film, a new kind of gas sensing optical thin film, was deposited by reactive rf magnetron sputtering technique as well as pure ZnO thin film. The transmission spectra to NO x of these films were measured, then the variation of sensitivity was derived from the transmission spectra. It was found that the sensitivity to NO x of Ag doped ZnO films was higher than that of pure ZnO films. The best sensitivity to NO x was achieved with a 5% Ag doped ZnO thin film, which was examined by auger electron spectroscopy (AES). The gas sensing transmission properties were analyzed by considering the Langmuir type adsorption equilibrium relation and it was shown that the theoretic analyses were excellently coincide with the experimental results.