动力学晶格蒙特卡洛方法模拟Cu薄膜生长
吴子若, 程鑫彬, 王占山. 动力学晶格蒙特卡洛方法模拟Cu薄膜生长[J]. 光子学报, 2010, 39(1): 62.
WU Zi-ruo, CHENG Xin-bin, WANG Zhan-shan. Kinetic Lattice Monte Carlo Simulation of Cu Thin Film Growth[J]. ACTA PHOTONICA SINICA, 2010, 39(1): 62.
[1] 颜国君,陈光德,邱复生,等.氮化铝薄膜的光学性能[J].光子学报.2006,35(2):221-223.
[2] 方晓玲,高斐,刘伟,等.SiO2薄膜中咔唑的发光特性[J].光子学报.2008,37(9):1825-1828.
FANG Xiao-ling,GAO Fei,LIU Wei,et al.Optical properties of amorphous silicon film by spectrophotometry[J].Acta Photonica Sinica,2008,37(9):1825-1828.
[3] . Atomistic processes in the early stages of thin-film growth[J]. Science, 1997, 276(5311): 377-383.
[4] . Thin-film cliffhanger[J]. Nature, 2002, 417(6892): 907-910.
[5] WANG L G,CLANCY P.Kinetic Monte Carlo simulation of the growth of polycrystalline Cu films[J].Surface Science,2001,473(1-2):25-38.
[6] . Fractal growth of two-dimensional islands:Au on Ru(0001)[J]. Phys Rev Lett, 1991, 67(23): 3279-3282.
[7] PARSCHAU M,SCHLATTERBECK D,CHRISTMANN K.Nucleation and growth of silver films on a rhenium (0001) surface:a combined STM and LEED study[J].Surf Sci,1997,376(1-3):133-150.
[8] . Inversion of growth speed anisotropy in two dimensions[J]. Phys Rev Lett, 1993, 70(25): 3943-3946.
[9] . Diffusion-limited aggregation,a kinetic critical phenomenon[J]. Phys Rev Lett, 1981, 47(19): 1400-1403.
[10] . Monte Carlo study of reversible growth of clusters on a surface[J]. Phys Rev B, 1985, 32(3): 1824-1826.
[11] . Bonding-geometry dependence of fractal growth on metal surfaces[J]. Phys Rev Lett, 1994, 73(13): 1829-1832.
[12] CORBETT C B.The kinetic monte carlo method:foundation,implementation,and application[J].Comput Methods Appl Mech Engrg,2008,197(41-42):3386-3398.
[13] TAKANO J,TAKAI O,KOGURE Y,et al.Molecular dynamics,Monte Carlo and their hybrid methods:applications to thin film growth dynamics[J].Thin Solid Film,1998,334(1-2):209-213.
[14] . Saturation and scaling of epitaxial island densities[J]. Phys Rev Lett, 1994, 72(20): 3194-3197.
[15] . Diaz de la Rubia,GILMER G H.An atomistic simulator for thin film deposition in three dimensions[J]. J Appl Phys, 1998, 84(7): 3636-3649.
[16] WANG Z Y,LI Y H,ADAMS J B.Kinetic lattice Monte Carlo simulation of facet growth rate[J].Surface Science,2000,450(1-2):51-63.
[17] . Modeling Cu thin film growth[J]. Thin Solid Films, 2000, 365(2): 201-210.
[18] . Self-diffusion and impurity diffusion of fee metals using the five-frequency model and the embedded atom method[J]. J Mater Res, 1989, 4(1): 102-112.
[19] . Kinetic Monte Carlo simulation of film morphologies at the initial stages[J]. Sci China Ser G-Phys Mech Astron, 2008, 51(1): 56-63.
[20] . Kinetic Monte Carlo simulation of Cu thin film growth[J]. Vacuum, 2004, 72(4): 405-410.
吴子若, 程鑫彬, 王占山. 动力学晶格蒙特卡洛方法模拟Cu薄膜生长[J]. 光子学报, 2010, 39(1): 62. WU Zi-ruo, CHENG Xin-bin, WANG Zhan-shan. Kinetic Lattice Monte Carlo Simulation of Cu Thin Film Growth[J]. ACTA PHOTONICA SINICA, 2010, 39(1): 62.
PDF全文
