光学 精密工程, 2010, 18 (12): 2549, 网络出版: 2011-01-26   

二维硅薄膜光子晶体波导的设计及制作

Design and fabrication of two-dimensional photonic crystal waveguides on silicon films
作者单位
1 中国科学院 长春光学精密机械与物理研究所 应用光学国家重点实验室,吉林 长春 130033
2 中国科学院 研究生院,北京 100039
引用该论文

崔乃迪, 梁静秋, 梁中翥, 周建伟, 宁永强, 王维彪. 二维硅薄膜光子晶体波导的设计及制作[J]. 光学 精密工程, 2010, 18(12): 2549.

CUI Nai-di, LIANG Jing-qiu, LIANG Zhong-zhu, ZHOU Jian-wei, NING Yong-qiang, WANG Wei-biao. Design and fabrication of two-dimensional photonic crystal waveguides on silicon films[J]. Optics and Precision Engineering, 2010, 18(12): 2549.

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    WANG J C, RONG W B, LI X X, et al.. Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining[J]. Opt. Precision Eng., 2008(16): 4,636-641. (in chinese)

崔乃迪, 梁静秋, 梁中翥, 周建伟, 宁永强, 王维彪. 二维硅薄膜光子晶体波导的设计及制作[J]. 光学 精密工程, 2010, 18(12): 2549. CUI Nai-di, LIANG Jing-qiu, LIANG Zhong-zhu, ZHOU Jian-wei, NING Yong-qiang, WANG Wei-biao. Design and fabrication of two-dimensional photonic crystal waveguides on silicon films[J]. Optics and Precision Engineering, 2010, 18(12): 2549.

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